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Focused ion beam scanning electron microscope (FIB-SEM)

聚焦离子束扫描电子显微镜 (FIB-SEM)

基本信息

批准号：
466823919
负责人：
金额：
--
依托单位：
Technische Universität Chemnitz
依托单位国家：
德国
项目类别：
Major Research Instrumentation
财政年份：
2022
资助国家：
德国
起止时间：
2021-12-31 至无数据
项目状态：
未结题

来源：
https://gepris.dfg.de/gepris/projekt/466823919?language=en
关键词：
Focused ion beam scanning electron

项目摘要

The proposed large-scale dual-beam device will be used for fast, highly accurate and automated preparation of TEM lamellae. It is to be used in the planned transmission electron microscopy centre at Chemnitz University of Technology, where it will take over the main part of these precision preparation tasks and ensure a high throughput of samples with a wide range of properties.The most important prerequisites for this are powerful ion and electron optics, the possibilities of in-situ nano-manipulation, a platinum, carbon and xenon difluoride gas injection system, and high-resolution material analysis. In addition, appropriate detectors are needed to select a suitable sample location as well as for the inspection of the lamellae. For an efficient workflow, the instrument should allow for extensive automation. This not only shortens the time required per lamella, but also allows the preparation of several samples overnight.Exactly these criteria are fulfilled by the FIB/REM combination planned here. The device has the required performance, universality and the necessary unique selling propositions and is strategically in line with the professional orientation of Chemnitz University of Technology and the TEM Centre and is also characterized by an excellent price-performance ratio. It is essential for the future success of research and development, teaching and university-wide initiatives.

提出的大规模双光束装置将用于快速，高精度和自动化的TEM薄片制备。它将用于切姆尼茨工业大学计划中的透射电子显微镜中心，在那里它将承担这些精密制备任务的主要部分，并确保具有广泛特性的样品的高通量。为此，最重要的先决条件是强大的离子和电子光学，原位纳米操作的可能性，铂，碳和二氟化氙气体注入系统，和高分辨率材料分析。此外，还需要适当的检测器来选择合适的样品位置以及用于检测薄片。为了实现高效的工作流程，该仪器应允许广泛的自动化。这不仅缩短了每个薄片所需的时间，而且允许在一夜之间制备多个样品。这里计划的FIB/REM组合正好满足这些标准。该设备具有所需的性能、通用性和必要的独特销售主张，在战略上符合切姆尼茨理工大学和TEM中心的专业方向，并且具有出色的性价比。它是研究和开发，教学和大学范围内的举措未来的成功必不可少。