Focused ion beam scanning electron microscope (FIB-SEM)

所提出的大规模双光束装置将用于快速、高精度和自动化地制备透射电子显微镜薄片。它将用于计划中的开姆尼茨理工大学的透射电子显微镜中心，在那里它将接管这些精密制备任务的主要部分，并确保具有广泛性质的样品的高通量。最重要的先决条件是强大的离子和电子光学，原位纳米操纵的可能性，铂、碳和二氟化氙气注入系统，以及高分辨率材料分析。此外，需要适当的检测器来选择合适的样品位置以及对薄片进行检查。为实现高效的工作流程，仪器应允许广泛的自动化。这不仅缩短了每个薄板所需的时间，还允许在一夜之间准备几个样品。这些标准完全符合这里计划的FIB/REM组合。该设备具有所需的性能、通用性和必要的独特销售主张，在战略上符合开姆尼茨科技大学和瞬变电磁中心的专业定位，并具有优异的性价比。这对未来研发、教学和大学范围内的倡议的成功至关重要。

The proposed large-scale dual-beam device will be used for fast, highly accurate and automated preparation of TEM lamellae. It is to be used in the planned transmission electron microscopy centre at Chemnitz University of Technology, where it will take over the main part of these precision preparation tasks and ensure a high throughput of samples with a wide range of properties.The most important prerequisites for this are powerful ion and electron optics, the possibilities of in-situ nano-manipulation, a platinum, carbon and xenon difluoride gas injection system, and high-resolution material analysis. In addition, appropriate detectors are needed to select a suitable sample location as well as for the inspection of the lamellae. For an efficient workflow, the instrument should allow for extensive automation. This not only shortens the time required per lamella, but also allows the preparation of several samples overnight.Exactly these criteria are fulfilled by the FIB/REM combination planned here. The device has the required performance, universality and the necessary unique selling propositions and is strategically in line with the professional orientation of Chemnitz University of Technology and the TEM Centre and is also characterized by an excellent price-performance ratio. It is essential for the future success of research and development, teaching and university-wide initiatives.