Research and Development of Adhesive Bonding Device for Microfabrication

微细加工粘接装置的研究与开发

• 批准号: 16560126
• 负责人: NAKAZATO Yuichi
• 金额: $ 1.92万
• 依托单位: Nippon Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16560126/
• 关键词: Micromanipulator; Scale Effect; Surface Forces; Micromechanism; Gripping Mechanism; Adhesive; Microfabrication; Surface Tension; 把待機構

The fabrication of microsized structures has been realized by the use of IC technology, such as photofabrication, and fine gears and shafts have been fabricated on a Si substrate. Although structures with sizes of approximately 10 μm to 100 μm can be observed using the current technology, structures with sizes in the range from 10 μm to 100 μm are considered to be difficult to manipulate ; thus, this range is called the "unmanipulable" range. Therefore, manipulators for handling structures of these sizes are required. However, if microsized structures are handled using these manipulators and assembled by fitting them into each other to form a micromechanism, an extremely small dimensional tolerance is required, which is difficult to realize. We proposed that microsized structures can be assembled by adhesive bonding because of the scale effect, and hence evaluated a method for fixing microsized structures using an adhesive.In 2004, a fabrication method of discharge nozzles and their shapes were studied. From various experiments, we found that a glass thin tube can be fabricated relatively simply and effectively by heating and rapid withdrawal. Subsequently, the effect of the inner diameter of the discharge nozzle on the size of droplets discharged was studied. The size of droplets discharged decreased when the inner diameter of the discharge nozzle was reduced from 10 μm to 2 μm. In particular, when the inner diameter was 5 μm or less, the size of the droplet decreased markedly, and a droplet with a diameter of 10 μm or less was observed. In 2005, by devising the nozzle shape, the discharge of droplets with a diameter of approximately 1 μm was realized. In conclusion, we established the fabrication method and effective shape of the nozzle of an adhesive discharge device, which are essential for the adhesive bonding of microsized structures.

利用光刻等集成电路技术实现了微尺寸结构的制造，并在硅衬底上制造了精细的齿轮和轴。虽然使用目前的技术可以观察到大小约为10μm到100μm的结构，但大小在10μm到100μm之间的结构被认为是难以操纵的；因此，这个范围被称为“不可操纵”范围。因此，需要用于处理这些尺寸的结构的机械手。然而，如果使用这些机械手来处理微尺寸的结构，并通过将它们相互装配以形成微机构，则需要极小的尺寸公差，这是很难实现的。由于尺度效应，我们提出可以通过胶接来组装微尺寸结构，并因此评估了一种使用胶粘剂固定微尺寸结构的方法。2004年，研究了一种放电喷嘴的制造方法及其形状。从各种实验中我们发现，通过加热和快速拉出，可以相对简单和有效地制造出玻璃薄管。随后，研究了喷嘴内径对喷射液滴尺寸的影响。当喷嘴内径从10μm减小到2μm时，液滴尺寸减小，特别是当喷嘴内径小于或等于5μm时，液滴尺寸显著减小，并观察到直径小于或等于10μm的液滴。2005年，通过设计喷嘴形状，实现了直径约1μm的液滴排放。综上所述，我们确定了粘接装置喷嘴的制作方法和有效形状，这对微尺寸结构的粘接是必不可少的。

项目成果

微小物把持を目的にしたマイクロピンセットの形状検討

检查用于抓取小物体的微型镊子的形状

• 发表时间: 2004
• 期刊: 日本機械学会2004年度年次大会講演論文集 7巻
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Takanori GOTO;Yuichi NAKAZATO;関根吾朗;中里裕一
• 通讯作者: 中里裕一

接着によるマイクロ接合技術の開発

使用粘合剂的微粘合技术的开发

• 发表时间: 2005
• 期刊: 日本機械学会関東支部第12期総会講演会講演論文集
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一
• 通讯作者: 中里裕一

Development of SMA-drive micromanipulator with an end effector made of thick diamond film

开发带有厚金刚石薄膜末端执行器的 SMA 驱动微操作器

• 发表时间: 2004
• 期刊: Proceedings of 11th IFToMM World Congress in Me chanism and Machine Science (CD-ROM)
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO
• 通讯作者: YUichi NAKAZATO

Study on the shape of discharge nozzle in adhesive injector

喷胶机喷嘴形状研究

• 发表时间: 2006
• 期刊: The 6^<th> Machine Design and Tribology Division Meeting in JSME
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO
• 通讯作者: Yuichi NAKAZATO

Development of micromanipulator made of diamond having reversal mechanism

具有反转机构的金刚石微操作器的研制

• 发表时间: 2005
• 期刊: Microsystem Technologies, Springer Volume 11, No.8-10
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO
• 通讯作者: Yuichi NAKAZATO