3D micro/nano structures for micro-chemo-mechatoronics

本研究的目的是建立利用半导体加工技术和机械加工技术制造微化机电一体化三维精细结构的技术，在传统的MEMS技术和化学修饰技术的基础上，采用电解抛光、电火花加工、束流沉积、组装、键合、压花、注塑等机械超精细加工技术，制造出具有化学分析用三维精细结构的微化学仪器。在本研究中，我们将微纳米结构分为针状、管状和沟道状结构。针状结构：发展了电子束沉积(EBD)方法，即利用扫描电子显微镜的光束产生碳纳米线，作为纳米尺度针状结构的制造技术。利用这种针状结构，DNA…的搬运工具研制了用于近场光学显微镜的多层和散射探头。此外，还尝试了EBD探头的导电控制，以应用于微电极、微传感器等。为了产生晶态石墨结构而不是无定形EBD，我们在电子显微镜上设置了碳源进料器、催化剂和催化剂活化的加热设备。结果，被认为是结晶的碳沉积是可产生的。管状结构：已经完成了利用聚焦离子束处理微玻璃管并产生管状结构的研究。作为应用实例，开发了微型吸管，它通过在吸管内部制备固定体积的皮升数量级的亲水性区域来执行定量分配。并开发了压电式垂直驱动的微吸管与亲水性可控的基板相结合，在基板上产生液滴的系统。沟道式结构：为大规模生产微型化学分析仪器，开发了现阶段主要采用湿法或干法腐蚀等化学技术制造玻璃通道芯片的机械加工方法。例如，尝试了用注入器在基板上涂覆玻璃微片，形成通道，烧结，生产玻璃芯片的加工方法。此外，为了处理使玻璃腐蚀的试剂，以及产生过高的热量和压力的反应，开发了具有良好的传热和抗冲击性能的金属微反应器。结果表明，将坡口形成的切割方法与覆盖层的激光熔接技术相结合，可以生产出400微米宽的不锈钢多层芯片。较少

The purpose of this research is establishing the technology to create the 3-dimensional fine structures for micro-chemo-mechatronics with semiconductor processing technology and machining technology.In addition to the conventional MEMS technique and chemical modification technology, mechanical ultra-fine processing technology, such as electrolysis polish, electrical discharge machining, beam deposition, assembly, bonding, embossing, injection molding, and so on is used to create microchemistry instruments equipped with the 3-dimensional fine structures for chemical analysis. In this research, we classified micro/nano structure into needlelike, tubular, and channel-like structure as the following items.Needlelike structure : The electron beam depositing (EBD) method which generates carbon nano-wire using the beam of a scanning electron microscope was developed as manufacturing technology of the nano meter scaled needlelike structure. Using this needlelike structure, handing tool of DNA … More and scattering probe for near-field optical microscope was developed. Furthermore, conductive control of an EBD probe was tried for the application to a micro electrode, micro sensor, etc. In order to generate crystalline graphite structure instead of amorphous EBD, we arranged the source feeder of carbon, a catalyst, and the heating equipment for activation of the catalyst in an electron microscope. As the result, the carbon deposition considered to be crystalline was generable.Tubular structure : Research which processes a micro glass pipe using focused ion beam and produces tubular structure has been done. As an example of application, micro pipet which performs fixed quantity dispensing by preparing hydrophilic area of the fixed volume of pico liter order in the interior of the pipet was developed. And also, the system which generates droplet on a substrate with the combination of the micro pipet verticaly drived by the piezo-electric device, and the substrate with controlled hydrophilicity was developed.Channel-like structure : The mechanical processing method for manufacturing glass channel chips mainly manufactured by the chemical technique such as a wet or dry etching at this stage, at high speed and low cost has been developed for mass-production of micro chemical analysis instruments. For example, processing method which coat a substrate with the glass flit by an injector, form channels, sinters and produces a glass chip was tried. Furthermore, in order to treat the reagent which makes glass corrode, and the reaction which generates excessive heat and pressure, the metal micro-reactor excellent in heat transfer and shock resistance was developed. It was shown that combining the cutting method for formation of the groove, and the bonding technology of the cover by the YAG laser-welding method, the multilayer chip made from stainless steel with 400 micrometers width channels is producible. Less