Micro Mechanical Reproduction Process to Duplicate 3D Sub-um Features

本研究介绍了一种微机械复制工艺，可以复制三维亚微米特征。该过程有三个子过程：使用传统的光刻或切割制造金属/玻璃模具，从模具复制树脂复制品上的结构，并从复制品复制产品上的结构。具体来说，我们尝试了(a)近场光学光刻，(b)牺牲掩模蚀刻(c)模具注射和压制。近场光学光刻技术采用电子束光刻和快速原子束蚀刻技术制备石英模具。该模具具有3D微观结构，由乙酰纤维素复制而成。复制品被放置在一个棱镜上，棱镜总反射442um波长的He-Cd激光。在复制品的表面，发射近场光，暴露光敏电阻。该工艺可以曝光50nm线和空间图案，但曝光受光的偏振或方向的影响。牺牲掩膜蚀刻工艺制备镀Ni-P铝基模具。模具压在旋转涂层的硅胶上，重现3D微观结构。硅胶将用作牺牲掩膜，并使用快原子束蚀刻再现结构。该工艺可以复制出一个直径为1微米，深为1微米的三角形凹槽的衍射光栅。模具注射和冲压工艺制造金属模具，并通过电机驱动的注射机再现3D微结构。模具在注射后使用压电元件压制，可以复制1um的凹槽和1um深的凹槽。

This research introduces a micro mechanical reproduction process, which duplicates a 3D sub-um features. The process has three sub-processes : fabricating a metal/glass mold using conventional photolithography or cutting, duplicating the structures on a resin replica from the mold and duplicating the structures on a product from the replica. Concretely, we tried (a) near-field optical lithography, (b) sacrificially masked etching (c) mold injection and press. Near-field optical lithography fabricates a quartz mold using electron beam lithography and fast atom beam etching. The mold has 3D micro structures, which is stumped to an acetylcellulose replica. The replica is placed on a prism which total reflects the 442um wave-length He-Cd laser. On the surface of the replica, a near-field light is emitted, exposing the photo-resisit. The process could expose a 50nm line and space pattern, but reveals the exposure is influenced by polarization or direction of light. Sacrificial masked etching process fabricates a Ni-P plated Al-based mold. The mold is pressed on a spin coated silicone, reproducing 3D micro structure. The silicone will works as a sacrifice mask and reproduces the structures using fastatom beam etching. The process could reproduce a diffraction grating with 1 um pitched, 1um deep and triangular grooves. Mold injection and press process fabricates a metal mold and reproduces 3D microstructures with a motor-driven injection machine. The mold is pressed using a piezo element just after injecting and can duplicate 1um pithed and 1um deep grooves.