Micro Mechanical Reproduction Process to Duplicate 3D Sub-um Features

本研究介绍一种微机械复制过程，复制一个三维亚微米特征。该过程有三个子过程：使用传统的光刻或切割制造金属/玻璃模具，从模具复制树脂复制品上的结构，以及从复制品复制产品上的结构。具体地说，我们尝试了（a）近场光学光刻，（B）牺牲掩模蚀刻（c）模具注射和压力。近场光学光刻技术是利用电子束光刻和快速原子束刻蚀技术制作石英模具。该模具具有3D微结构，其被填充到乙酰纤维素复制品。复制品放置在棱镜上，棱镜全反射442 μ m波长的He-Cd激光。在复制品的表面上，发射近场光，使光致抗蚀剂曝光。该工艺可以曝光50 nm的线和空间图案，但揭示了曝光受到光的偏振或方向的影响。采用牺牲掩模腐蚀工艺制备了镀Ni-P的铝基模具。将模具压在旋涂的硅树脂上，复制3D微结构。硅树脂将作为牺牲掩模，并使用fastatom光束蚀刻再现结构。该工艺可以再现出具有1 μ m间距、1 μ m深度和三角形凹槽的衍射光栅。模具注塑和冲压工艺制造金属模具，并使用电机驱动的注塑机复制3D微结构。该模具是使用压压电元件刚刚注入后，可以复制1um pithed和1um深的凹槽。

This research introduces a micro mechanical reproduction process, which duplicates a 3D sub-um features. The process has three sub-processes : fabricating a metal/glass mold using conventional photolithography or cutting, duplicating the structures on a resin replica from the mold and duplicating the structures on a product from the replica. Concretely, we tried (a) near-field optical lithography, (b) sacrificially masked etching (c) mold injection and press. Near-field optical lithography fabricates a quartz mold using electron beam lithography and fast atom beam etching. The mold has 3D micro structures, which is stumped to an acetylcellulose replica. The replica is placed on a prism which total reflects the 442um wave-length He-Cd laser. On the surface of the replica, a near-field light is emitted, exposing the photo-resisit. The process could expose a 50nm line and space pattern, but reveals the exposure is influenced by polarization or direction of light. Sacrificial masked etching process fabricates a Ni-P plated Al-based mold. The mold is pressed on a spin coated silicone, reproducing 3D micro structure. The silicone will works as a sacrifice mask and reproduces the structures using fastatom beam etching. The process could reproduce a diffraction grating with 1 um pitched, 1um deep and triangular grooves. Mold injection and press process fabricates a metal mold and reproduces 3D microstructures with a motor-driven injection machine. The mold is pressed using a piezo element just after injecting and can duplicate 1um pithed and 1um deep grooves.