Micro Mechanical Reproduction Process to Duplicate 3D Sub-um Features

用于复制 3D Sub-um 特征的微机械复制工艺

• 批准号: 10355006
• 负责人: NAKAO Masayuki
• 金额: $ 19.39万
• 依托单位: University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10355006/
• 关键词: micro mechanical reproduction; 3D sub-um features; near-field optical lithography; sacrificially masked etching; mold injection and press; electron beam lithography; fast atom beam etching; 回折格子; 転写; マイクロマシン; 情報機器; レプリカ; 高速原子線; 近接場光; 3次元構造 /

This research introduces a micro mechanical reproduction process, which duplicates a 3D sub-um features. The process has three sub-processes : fabricating a metal/glass mold using conventional photolithography or cutting, duplicating the structures on a resin replica from the mold and duplicating the structures on a product from the replica. Concretely, we tried (a) near-field optical lithography, (b) sacrificially masked etching (c) mold injection and press. Near-field optical lithography fabricates a quartz mold using electron beam lithography and fast atom beam etching. The mold has 3D micro structures, which is stumped to an acetylcellulose replica. The replica is placed on a prism which total reflects the 442um wave-length He-Cd laser. On the surface of the replica, a near-field light is emitted, exposing the photo-resisit. The process could expose a 50nm line and space pattern, but reveals the exposure is influenced by polarization or direction of light. Sacrificial masked etching process fabricates a Ni-P plated Al-based mold. The mold is pressed on a spin coated silicone, reproducing 3D micro structure. The silicone will works as a sacrifice mask and reproduces the structures using fastatom beam etching. The process could reproduce a diffraction grating with 1 um pitched, 1um deep and triangular grooves. Mold injection and press process fabricates a metal mold and reproduces 3D microstructures with a motor-driven injection machine. The mold is pressed using a piezo element just after injecting and can duplicate 1um pithed and 1um deep grooves.

这项研究引入了微机械复制过程，复制了 3D 亚微米特征。该过程具有三个子过程：使用传统的光刻或切割制造金属/玻璃模具、从模具复制树脂复制品上的结构以及从复制品复制产品上的结构。具体来说，我们尝试了（a）近场光学光刻，（b）牺牲掩模蚀刻（c）模具注射和压制。近场光学光刻使用电子束光刻和快速原子束蚀刻来制造石英模具。该模具具有 3D 微结构，可被压制成乙酰纤维素复制品。该复制品被放置在一个棱镜上，该棱镜全反射 442um 波长的 He-Cd 激光。在复制品的表面上，发出近场光，使光致抗蚀剂曝光。该工艺可以曝光 50nm 的线和空间图案，但显示曝光会受到光的偏振或方向的影响。牺牲掩模蚀刻工艺制造了镀镍磷的铝基模具。该模具被压在旋涂硅胶上，再现 3D 微观结构。硅胶将用作牺牲掩模，并使用快原子束蚀刻来复制结构。该工艺可以再现具有 1 微米间距、1 微米深和三角形凹槽的衍射光栅。模具注射和冲压工艺可制造金属模具并使用电机驱动注射机再现 3D 微观结构。注射后立即使用压电元件对模具进行压制，可复制 1um 的螺距和 1um 深的凹槽。

项目成果

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M.Hatakeyama 等人：“用于制造微衍射光栅结构和微纹理表面的集成快速原子束工艺”Adv.Info.Storage Syst.. 第 10 卷。

M.Nakao, et.al.: "Hologram Diffraction Grating of Glass with Triangular Grooves Fabricated by Sacrificial Mask FAB Etching"Proc.of ASPE'98. 338-341 (1998)

M.Nakao 等人：“通过牺牲掩模 FAB 蚀刻制造的带有三角形凹槽的玻璃的全息衍射光栅”Proc.of ASPE98。

M.Nakao, J.Kumaki et.al: "Stamp and Damascene Process for Micro-Structure Reproduction on Glass Substrate" Proc.of ASPE Precision Fabrication and Replication 99. (1999年4月発表予定). (1999)

M.Nakao、J.Kumaki 等人：“玻璃基板上微结构复制的印章和镶嵌工艺”Proc. of ASPE Precision Fabrication and Replication 99。（计划于 1999 年 4 月公布）。

Masayuki Nakao, et.al.: "Stamp and Damascened Process for Micro-Structure Reproduction on Glass Substrate"Proc.of ASPE Precision Fabrication and Reproduction. 64-68 (1999)

Masayuki Nakao 等人：“玻璃基板上微结构复制的压印和镶嵌工艺”Proc.of ASPE 精密制造和复制。

M. Nakao, T. Go, Q. Yang, Y. Hatamura: "Injection Molding for Micro Structure of Optical Elements Using Mold-Core Extruction"Proceedings of ASPE Spring Topical Meeting on Precision Fabrication and Replication. 19. 50-54 (1999)

M. Nakao、T. Go、Q. Yang、Y. Hatamura：“使用模芯挤出成型光学元件微结构”ASPE 精密制造和复制春季专题会议论文集。