Development of micro-cell-plasma driven by radio frequency for PDP

射频驱动PDP微细胞等离子体的开发

• 批准号: 09450146
• 负责人: MAKABE Toshiaki
• 金额: $ 7.81万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09450146/
• 关键词: Micro cell Plasma ( MCP); Radio frequency plasma; Plasma Display Pannel; Xe; Ne mixture; Chemical Ionization; Relaxation Contiuum (RCT) model; Plasma modeling; Capacitively coupled Plasma ( CCP); 体積(サイズ)効果; プラズマディスプレイパネル; マイクロプラズマセル

(1) The fundamental basis of the research is in the "relation between the driving frequency and the maintained plasma size". The sustaining voltage as a function of pressure, distance and frequency is first investigated by using 1D-t modeling up to the size of micro cell.(2) Conventional plasma display panel, which consists of three electrodes parallel plate system covered by a thin insulator, driven at 100 kHz is numerically investigated as for the writing, scanning, and erasing. As a result, the function of these three electrodes has been clarified. The significant disadvantage of the conventional PDP driven at low frequency results from a large energy loss by the transport of massive ions produced in the cell to the wall.(3) Direct numerical procedure of the Boltzmann equation has been applied to investigate the influence of the gas mixture between Xe and Ne on the electron swarm parameter. The database of the electron swarm parameter has been constructed.(4) A capacitively coupled cylindrical cell plasma with micro meter size is proposed for "the Micro-Cell-Plasma". The characteristics of MCP driven at 50 MHz are simulated and discussed in detail.

(1)研究的基本依据是“驱动频率与维持等离子体尺寸的关系”。首次利用1D-t模型研究了维持电压随压力、距离和频率的变化规律。(2)对由三电极平行板系统和薄绝缘体组成的常规等离子体显示板系统在100 kHz驱动下的写入、扫描和擦除进行了数值模拟。从而明确了这三种电极的作用。传统的PDP在低频驱动下的显著缺陷是由于胞内产生的大量离子向壁面的输运造成了巨大的能量损失。(3)采用Boltzmann方程的直接数值方法研究了Xe和Ne之间的混合气体对电子群参数的影响。建立了电子群参数数据库。(4)提出了一种适用于微细胞等离子体的微米级电容耦合圆柱形细胞等离子体。对50 MHz驱动的MCP的特性进行了详细的模拟和讨论。

项目成果

J. Sumioka, M. Kurihara and T. Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc of 17th Symp on Plasma Proceeding. 283-286 (2000)

J. Sumioka、M. Kurihara 和 T. Makabe：“具有三电极系统的 Xe 中传统 PDP 的 2D 建模”Proc of 17th Symp on Plasma Proceeding。

M.Kurihara: "RF plasma characteristics in a micro-cell in Xe by using RCT model" Extended abstracts in 4^<th> Int.Cont.on Reactive Plasmas. 39-40 (1998)

M.Kurihara：“使用 RCT 模型在 Xe 中的微电池中实现 RF 等离子体特性”第 4 期 Int.Cont.on Reactive Plasmas 中的扩展摘要。

M.Hasebe: "2D modeling of nonvolatile particle transport from etched surface in RIE" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 186-189 (1998)

M.Hasebe：“RIE 中蚀刻表面的非挥发性颗粒传输的二维建模”第 15 期 Symp.On 等离子体处理论文集。

真壁利明、栗原優: "Frequency characteristics in a micro-cell plasma in Xe by using RCT model"Program of the 52th GEC. 44, No.4. 19 (1999)

Toshiaki Makabe、Yu Kurihara：“利用 RCT 模型研究 Xe 中微细胞等离子体的频率特性”第 52 届 GEC 计划，第 44 期，第 19 期（1999 年）。

J.Sumioka,M.Kurihara,T.Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc.of 17th Symp.on Plasma Processing. 283-286 (2000)

J.Sumioka、M.Kurihara、T.Makabe：“具有三电极系统的 Xe 中传统 PDP 的 2D 建模”Proc.of 17th Symp.on Plasma Process。