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Development of micro-cell-plasma driven by radio frequency for PDP

Development of micro-cell-plasma driven by radio frequency for PDP
射频驱动PDP微细胞等离子体的开发
批准号:
09450146
负责人:
MAKABE Toshiaki
金额:
$7.81万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1997
资助国家:
日本
项目状态:
已结题
起止时间:
1997 至 1999

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中文摘要
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英文摘要
(1) The fundamental basis of the research is in the "relation between the driving frequency and the maintained plasma size". The sustaining voltage as a function of pressure, distance and frequency is first investigated by using 1D-t modeling up to the size of micro cell.(2) Conventional plasma display panel, which consists of three electrodes parallel plate system covered by a thin insulator, driven at 100 kHz is numerically investigated as for the writing, scanning, and erasing. As a result, the function of these three electrodes has been clarified. The significant disadvantage of the conventional PDP driven at low frequency results from a large energy loss by the transport of massive ions produced in the cell to the wall.(3) Direct numerical procedure of the Boltzmann equation has been applied to investigate the influence of the gas mixture between Xe and Ne on the electron swarm parameter. The database of the electron swarm parameter has been constructed.(4) A capacitively coupled cylindrical cell plasma with micro meter size is proposed for "the Micro-Cell-Plasma". The characteristics of MCP driven at 50 MHz are simulated and discussed in detail.
期刊论文(25)
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会议论文
J. Sumioka, M. Kurihara and T. Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc of 17th Symp on Plasma Proceeding. 283-286 (2000)
J. Sumioka、M. Kurihara 和 T. Makabe:“具有三电极系统的 Xe 中传统 PDP 的 2D 建模”Proc of 17th Symp on Plasma Proceeding。
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M.Kurihara: "RF plasma characteristics in a micro-cell in Xe by using RCT model" Extended abstracts in 4^<th> Int.Cont.on Reactive Plasmas. 39-40 (1998)
M.Kurihara:“使用 RCT 模型在 Xe 中的微电池中实现 RF 等离子体特性”第 4 期 Int.Cont.on Reactive Plasmas 中的扩展摘要。
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M.Hasebe: "2D modeling of nonvolatile particle transport from etched surface in RIE" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 186-189 (1998)
M.Hasebe:“RIE 中蚀刻表面的非挥发性颗粒传输的二维建模”第 15 期 Symp.On 等离子体处理论文集。
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真壁利明、栗原優: "Frequency characteristics in a micro-cell plasma in Xe by using RCT model"Program of the 52th GEC. 44, No.4. 19 (1999)
Toshiaki Makabe、Yu Kurihara:“利用 RCT 模型研究 Xe 中微细胞等离子体的频率特性”第 52 届 GEC 计划,第 44 期,第 19 期(1999 年)。
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23
    Development of micro plasma display pannel driven by radio frequency
    • 批准号:
      09555111
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $6.78万
    • 财政年份:
      1997
    • 负责人:
      MAKABE Toshiaki
    • 依托单位:
    Development of low temperature rf plasma model for material process
    • 批准号:
      08044169
    • 项目类别:
      Grant-in-Aid for international Scientific Research
    • 资助金额:
      $2.94万
    • 财政年份:
      1996
    • 负责人:
      MAKABE Toshiaki
    • 依托单位:
    Hybrid-Optimal Control of Reactive Low frequency Discharge plasmas
    海外基金