Physical vapour deposition

物理气相沉积

• 批准号: 519675664
• 金额: --
• 依托单位: Hochschule Kaiserslautern
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2023
• 资助国家: 德国
• 起止时间: 2022-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/519675664?language=en
• 关键词: Physical; vapour; deposition

The Department of Computer Sciences and Microsystems Technology, and the research focus area "Integrated Miniaturized Systems" (IMS) require a system for physical vapor deposition (PVD) to research modern micro- and nanosystems. The IMS research focus area (www.hs-kl.de/ims) is very successful and conducts numerous, mainly third-party funded, research projects, with high quality scientific publications. A particular research focus is on interdisciplinary projects at the interface of life sciences and microsystems technology, developing, for example, novel biosensors, electrode arrays and electrophysiological measurement systems. To manufacture such systems, the PVD applied for is needed as a central component of a fabrication process chain in the clean room. The procurement is urgently required because the currently available system can only be used to a limited extent due to the age of the equipment and its inability to be repaired. PVD is particularly suitable for depositing very thin layers, up to partial monolayers, especially of electrically conductive metals, on a substrate. These layers have excellent quality and homogeneity, meeting the requirements of demanding microsystems research. PVD is an established process in microsystems technology and is used in particular to produce electrodes and conductive tracks, e.g. for biosensors or electrode arrays for deriving neuronal or other electrophysiological signals from individual cells or tissues. The combination of different material classes enables the production and research of novel sensor systems. For example, in the field of biosensors, graphene and other nanomaterials now play an important role, requiring metallic leads made of gold or platinum. In the field of magnetic sensors, complex layer systems of iron, nickel, cobalt and molybdenum are increasingly being used. A versatile PVD system is needed to deposit these different materials. In particular, for the deposition of high-density and low-defect coatings, the system requires an electron beam evaporation source with sources that can be changed under vacuum. For fast deposition of thicker coatings, additional sources for thermal deposition are needed. By using this system for the fabrication of novel micro- and nanostructures, we expect a high gain in knowledge in the context of ongoing and planned research projects. The PVD system is an important link in a process chain in the clean room and will be complemented by other existing equipment on site. The department has many years of experience in the operation of cleanroom facilities. All personnel and infrastructure requirements for operating the tool are already in place at the site.

计算机科学和微系统技术部以及研究重点领域“集成的微型化系统”（IMS）需要一个用于物理蒸气沉积系统（PVD），以研究现代微型和纳米系统。 IMS研究焦点区域（www.hs-kl.de/ims）非常成功，并开展了许多由第三方资助的研究项目，具有高质量的科学出版物。特定的研究重点是生命科学和微系统技术界面上的跨学科项目，例如开发新型生物传感器，电极阵列和电生理测量系统。为了制造此类系统，需要应用PVD作为清洁室中制造过程链的核心组成部分。迫切需要采购，因为由于设备的年龄及其无法修复，目前可用的系统只能在有限的范围内使用。 PVD特别适合沉积非常薄的层，直至部分单层，尤其是在基板上的导电金属的部分。这些层具有良好的质量和同质性，满足了要求微系统研究的要求。 PVD是微型系统技术中的一个既定过程，特别用于生产电极和导电轨道，例如用于生物传感器或电极阵列，用于从单个细胞或组织中得出神经元或其他电生理信号。不同材料类的组合可以实现新型传感器系统的生产和研究。例如，在生物传感器的领域，石墨烯和其他纳米材料现在起着重要作用，需要金属铅由金或铂制成。在磁传感器的领域，越来越多地使用铁，镍，钴和钼的复杂层系统。需要使用多功能PVD系统来沉积这些不同的材料。特别是，对于高密度和低缺陷涂层的沉积，系统需要一个可以在真空下改变源的电子束蒸发源。为了快速沉积较厚的涂层，需要其他用于热沉积的来源。 通过使用该系统来制造新型的微型和纳米结构，我们预计在正在进行的和计划的研究项目的背景下，知识的增长很高。 PVD系统是洁净室中过程链中的重要链接，将由现有设备上的其他现有设备进行补充。该部门在洁净室设施的运营方面拥有多年的经验。该工具操作工具的所有人员和基础设施要求都已在该网站上。