3D microscopy by using acoustic wave and electron beam

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The main of this project is to get some bacic concepts of three dimensional microscopy which is especially for observing inner structure of various small devices such as integrated circuits. We obtained the following two new resulys. 1. An acoustic image arising from the three dimensional stucture was observed. Two acoustic transtic transducers and one specially made piezoelectric film were set on each side of right prism. In this arrangement,acoustic image on the film was observed by the scanning electrn microscope. 2. Because infrared light penetratc some of specimens like silicon wafer as good as acoustic wave,it is also used to see through the inside of the specimen three dimensionally with the stereoscopic technique.