3D microscopy by using acoustic wave and electron beam

使用声波和电子束的 3D 显微镜

• 批准号: 61550285
• 负责人: SUGA Hiroshi
• 金额: $ 0.7万
• 依托单位: Osaka Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1986
• 资助国家: 日本
• 起止时间: 1986 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-61550285/
• 关键词: Acoustic microscopy; 3D Microscopy; 赤外線顕微鏡; ホログラム顕微鏡; 超音波ホログラム顕微鏡

The main of this project is to get some bacic concepts of three dimensional microscopy which is especially for observing inner structure of various small devices such as integrated circuits. We obtained the following two new resulys. 1. An acoustic image arising from the three dimensional stucture was observed. Two acoustic transtic transducers and one specially made piezoelectric film were set on each side of right prism. In this arrangement,acoustic image on the film was observed by the scanning electrn microscope. 2. Because infrared light penetratc some of specimens like silicon wafer as good as acoustic wave,it is also used to see through the inside of the specimen three dimensionally with the stereoscopic technique.

本计画的主要目的是了解三维显微术的基本概念，尤其是对各种小型元件（如积体电路）内部结构的观察。我们得到了以下两个新结果。1.观察到由三维结构产生的声像。在直角棱镜的两侧各放置两个声换能器和一片特制的压电薄膜。在这种布置中，通过扫描电子显微镜观察膜上的声像。2.由于红外光对硅晶片等样品的穿透性与声波相当，因此也可用于立体透视技术中的样品内部三维透视。

项目成果

菅博,小寺正敏: 電子情報通信学会論文誌. 70. (1987)

Hiroshi Suga、Masatoshi Kodera：《电子、信息和通信工程师学会汇刊》70。（1987）

Masatoshi Kotera, Hiroshi Suga: "A simulation of keV electron scattering in a charged-up spacimen" Journal of Applied Physics. 63,No.2. 261-268 (1988)

Masatoshi Kotera、Hiroshi Suga：“充电太空中 keV 电子散射的模拟”应用物理学杂志。