权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of Electron Emission Microscope Using Metastable Atoms as Probe and Its Application to Studies of Solid Surfaces

亚稳原子探针电子发射显微镜的研制及其在固体表面研究中的应用

基本信息

批准号：
01060002
负责人：
HARADA Yoshiya
金额：
$ 144.64万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Specially Promoted Research
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1993
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01060002/
关键词：
Electron Microscope Electron Spectroscopy Solid Surface

项目摘要

An electron emission microscope (EEM) using metastable atoms, low energy electrons, and photons as probes, has been developed and applied to the observation of various solid surfaces (surfaces of metals, semiconductors, thin organic films, etc.). Compared with the widely used microscopes such as the transmission electron microscope (TEM) and the scanning electron microscope (SEM), the EEM (1) provides information directly related to the electronic structure of the surface, (2) is selectively sensitive to the surface, and (3) scarcely destroys the surface.In contrast to other EEM, our new EEM has the following characteristics :(1) The electron optical system is kept under ultra-high vacuum for the purpose of the surface observation.(2) An energy analyzer included in the imaging system allows us to measure energy spectra in the surface micro-region and also to observe energy-selected images.(3) The EEM can be used as a metastable electron emission microscope (MEEM), low-energy electron e … More mission microscope (LEEM), and photoelectron emission microscope (PEEM) corresponding to three kinds of probes. The MEEM provides information on the outermost layr of the surface and the LEEM and PEEM give information on the top several layrs. Furthermore, the mirror electron microscope (MEM) using the electron probe, provides images reflecting the electrical potential of the surface.The central purpose of this study has been the development of the MEEM and this has been finally achieved : The MEEM images of the surface and the metastable atom electron spectrum (MAES) of the surface micro-region have been obtained for the first time. It has been shown that the MEEM enables us to observe sensitively the electronic state and the molecular orientation of the outermost layr in the micro-region of the surface.The MEEM is suitable for surfaces that are difficult to be observed by other microscopes (adsorbed surfaces, and surfaces of organic materials and biological systems), because, being introduced by thermal diffusion, metastable atoms have small velocity and scarcely destroy sample surfaces. Less

电子发射显微镜（EEM）利用亚稳原子、低能电子和光子作为探针，已被开发并应用于观察各种固体表面（金属、半导体、有机薄膜等表面）。与目前广泛使用的透射电子显微镜（TEM）和扫描电子显微镜（SEM）等显微镜相比，EEM(1)提供了与表面电子结构直接相关的信息，(2)对表面有选择性敏感，(3)几乎不破坏表面。与其他EEM相比，我们的新型EEM具有以下特点：(1)电子光学系统保持在超高真空下，用于表面观测。(2)成像系统中包含一个能量分析仪，可以测量表面微区域的能谱，也可以观察能量选择图像。(3) EEM可作为亚稳电子发射显微镜（MEEM）、低能电子发射显微镜（LEEM）和光电子发射显微镜（PEEM），分别对应三种探针。MEEM提供表面最外层的信息，LEEM和PEEM提供表面最上层的信息。此外，使用电子探针的镜像电子显微镜（MEM）提供反映表面电势的图像。本研究的中心目的是发展MEEM，并最终实现了这一目标：首次获得了表面的MEEM图像和表面微区亚稳原子电子能谱（MAES）。研究表明，MEEM可以灵敏地观察表面微区最外层的电子态和分子取向。MEEM适用于其他显微镜难以观察到的表面（吸附表面，有机材料和生物系统的表面），因为亚稳原子通过热扩散引入，具有很小的速度，几乎不破坏样品表面。少