In-Process Measurements of Surface-Roghness under Dynamic Speckle Illumination

动态散斑照明下表面粗糙度的在线测量

• 批准号: 01550097
• 负责人: YOSHIMURA Takeaki
• 金额: $ 1.34万
• 依托单位: Kobe University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1989
• 资助国家: 日本
• 起止时间: 1989 至 1990
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01550097/
• 关键词: Surface-Roughness; Non-Contact; Image Processing; Dynamic Speckle; 2nd Order Moment; Cold Rolled Steel; 動的スペックル照射; スペックル・コントラスト法; 縦粗さ・横粗さの分離

A new method to measure the surface-roughness in process at non-contact have been investigated. The main results in this work are written as follows :1. Basic Studies to Determine Two Kinds of Roughness(1) Under the dynamic speckle illumination, the scattered field at a far field obeys Gaussian statistics. From properties of the scattered light, we deduced the intensity correlation function in the explicit form. So, the speckle size of the light has been found to depend on the surface roughness.(2) The speckle size depends on fluctuations of the integrated intensity of the scattered light. If the 2nd order moment of the integrated intensity is measured two times for different experimental conditions, longitudinal and lateral roughness can be determined.2. In-process measurements of surface-roughness(1) Use of two-lens imaging system is able to measure the roughness from 0.01mum to 0.5 mum.(2) We developed the apparatus to measure the 2nd order moment by digitally processing the video signal from TV camera at high speed. If the 8-bit A/D converter is used, the moment is measured at 2% accuracy, and the roughness can be determined 2-dimensionally.(3) We developed the another apparatus to measure the intensity ratio of the lights scattered to different direction. This apparatus can determine the surface roughness of cold rolled steels in process.

研究了一种非接触测量加工表面粗糙度的新方法。本文的主要工作如下：1.确定两种粗糙度的基础研究（1）在动态散斑照明下，远场散射场服从高斯统计。从散射光的性质出发，推导出了强度相关函数的显式表达式。因此，已经发现光的散斑大小取决于表面粗糙度。(2)散斑大小取决于散射光的积分强度的波动。在不同的实验条件下，通过两次测量积分光强的二阶矩，可以确定纵向和横向粗糙度.表面粗糙度的在线测量（1）使用双透镜成像系统能够测量0.01 μ m至0.5 μ m的粗糙度。(2)我们研制了一种对电视摄像机输出的高速视频信号进行数字化处理的二阶矩测量装置。如果使用8位A/D转换器，则以2%的精度测量力矩，并且可以二维地确定粗糙度。(3)我们研制了另一种测量不同方向散射光强度比的装置。该装置可用于冷轧钢板表面粗糙度的在线检测。

项目成果

T. YOSHIMURA: "Measurements of Two Roughness Paraters under Speckle Pattern Illumination" Optics Communications. Vol. 75. 208-214 (1990)

T. YOSHIMURA：“散斑图案照明下两个粗糙度参数的测量”光学通讯。

吉村武晃: "Surface roughness dependences of intnsity correlation function under the speckle pattern illumination" Journal of the Optical Society of America A.

Takeaki Yoshimura：“散斑图案照明下强度相关函数的表面粗糙度依赖性”美国光学学会杂志 A.

T.YOSHIMURA: "SurfaceーRoughness Dependence of the Intensity Correlation Function under Speckle Pattern lllumination" Journal of the Optical Society of America A. Vol.7. 2254-2259 (1990)

T.YOSHIMURA：“散斑图案照明下强度相关函数的表面粗糙度依赖性”美国光学学会杂志，第 7 卷，2254-2259（1990 年）。

T.YOSHIMURA: "Statistical Properties of Intensity Fluctuations Produced by Rough Surfaces under the Speckle Pattern lllumination" Proceeings of SPIEーThe International Society for Optical Engineering. Vol.1332. 835-842 (1990)

T.YOSHIMURA：“散斑图案照明下粗糙表面产生的强度波动的统计特性”国际光学工程学会论文集第 1332 卷（1990 年）。

T.YOSHIMURA: "Statistical Properties of Intensity Fluctuations Produced by Rough Surfaces under the Speckle Pattern Illumination" Proceeings of SPIEーThe International Society for Optical Engineering. Vol.1332. 835-842 (1990)

T.YOSHIMURA：“散斑图案照明下粗糙表面产生的强度波动的统计特性”国际光学工程学会论文集第 1332 卷（1990 年）。