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Research of Ultra Precision Linear Digital Scale by Using Regular Crystalline Lattice

利用规则晶格的超精密线性数字标尺的研究

基本信息

批准号：
02555033
负责人：
TAKADA Koji
金额：
$ 3.71万
依托单位：
Nagaoka University of Technology (N.U.T)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555033/
关键词：
Linear Scale Crystalline Lattice STM Nano-Technology リニアスケ-ルナノテクノロジ-

项目摘要

(1) The following single crystalline thin films were produced as digital linear scale;i) Au thin film deposited on HOPGii) CuAu alloy thin film deposited on NaCI, Micaiii) Au(111) thin film deposited on glass plateThese crystalline films were chemically stable in ambient atmosphere and maintained the lattice order in the range of 10nm.(2) A software to correct lateral deformation errors of image by using crystalline lattice was developed. Two-dimensional transformation function describing the lateral distortion is determined by comparing the STM image of reference crystalline lattice with its theoretical image. The transformation function corrects the distortion due to following error factors in XY scanning; i) the out of perpendicularity between X and Y axes ii) the scaling error of X and Y axes iii) non-linear motion of X and Y piezo-scanners.(3) A dual head STM which include one X-Y scanning stage and two independent tunneling unit was developed. A sample piece and a reference crystal are set on the front and back side of common XY stage, respectively, and the both STM image are obtained simultaneously by two Z tunneling unit. The two dimensional length measurement can be achieved accurately by comparing the STM image of the reference with the STM image if there is no relative displacement in XY plane between the two Z units during observation. Our developed dual head STM can be combined with a scanning electron microscope(SEM). In the experiments, to assess this equipment, two atomic STM image of HOPG were observed simultaneously by using this dual head STM.

(1)制备了以下单晶薄膜：(1)在HOPGII上沉积的Au薄膜)在NaCI上沉积的CuAu合金薄膜；(2)在玻璃板上沉积的Au(111)薄膜这些单晶薄膜在大气中化学稳定，并将晶格有序保持在10 nm范围内。(2)开发了利用晶格校正图像横向变形误差的软件。通过比较参考晶格的扫描隧道显微镜图像与理论图像，确定了描述横向变形的二维变换函数。该变换函数修正了XY扫描中由于下列误差因素引起的失真：1)X、Y轴不垂直；2)X、Y轴定标误差；3)X、Y压电式扫描器的非线性运动。(3)研制了一种包括一个X-Y扫描台和两个独立的隧道单元的双头STM。在共用XY工作台的正面和背面分别放置一个样片和一个参比晶体，通过两个Z隧道单元同时获得两个STM图像。在观测过程中，如果两个Z单元之间在XY平面上没有相对位移，则可以通过比较基准的STM图像和STM图像来精确地实现二维长度测量。我们开发的双头扫描隧道显微镜可以与扫描电子显微镜(SEM)相结合。在实验中，为了对该装置进行评估，利用这种双头STM同时观测了HOPG的两个原子STM图像。