Development of ultra precision straight-motion stage by referring a crystalline array on crystalline surface

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A lattice spacing of approximately 0.2 nm is stable and uniform over long range when the crystal are stress free. An atomic array on crystalline surface is also thought to be straightness-reference. Using a scanning tunneling microscope (STM), it is possible to obtain an atomic image on crystalline surface in air. An ultra precision straightness reference and digital lattice scale by referring a crystalline array on a crystalline surface can be achieved with STM. The following results were obtained.(1) Atomic tracking and movement control of the tip position of a STM by referring to atomic array on regular crystalline surface was developed. The maximum tracking length along atomic array on crystalline of graphite was around 100 nm. This control method can be extended to real-time length measurement with subnanometer resolution using regular crystalline lattice.(2) Ultra precision straight-motion stage by referring a crystalline array on crystalline surface was developed. The atomic tracking control was applied to the stage. The maximum tracking and moving length of 100 nm along atomic array on crystalline of graphite was achieved.