Surface acoustic wave convolver using a new ferroelastic Ta_2O_5 thin films.

声表面波卷积器采用新型铁弹Ta_2O_5薄膜。

• 批准号: 02555064
• 负责人: NAKAGAWA Yasuhiko
• 金额: $ 6.21万
• 依托单位: Faculty of Engineering, Yamanashi University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555064/
• 关键词: ferroelasticity; Ta_2O_5 thin film; surface acoustic wave; convolver

In this research, we get next results,(1) The first measurement of the material constants of ferroelastic Ta_2O_5 thin films have done. X-axis oriented Ta_2O_5 thin films were deposited on the fused quartz by using the dc diode sputtering method. The material constants were determined from the phase velocity and the electromechanical coupling constant of the bulk waves and the surface acoustic waves propagating on the layered substrate.(2) The precise analyses of the surface acoustic waveguide characteristics with the Green function have given us a very precise look at the field distribution on a waveguide. With the analytical results we can make a quantitative evaluation of the nonlinear component which was generated on the waveguide and we can further analytically obtain the amount of surface acoustic wave generated by the nonlinear components or the excitation sources and propagating perpendicular to the waveguide. This theory can be extended to the surface acoustic wave convolver using a multichannel waveguide.(3) We found a new phenomenon of the generation of a second harmonic component of the surface acoustic waves from the dot array which is replaced on the piezoelectric substrate instead of a surface acoustic waveguide. As a result, the direction of propagation for second harmonic can be controlled by frequency and periodic length of dots.

在本研究中，我们得到了以下结果：（1）首次测量了Ta_2O_5铁弹薄膜的材料常数。用直流二极管溅射法在熔融石英衬底上制备了X轴取向的Ta_2O_5薄膜。材料常数由在层状基底上传播的体波和表面声波的相速度和机电耦合常数确定。(2)用绿色函数对声表面波特性进行了精确的分析，使我们对波导上的场分布有了一个非常精确的了解。利用分析结果可以对波导上产生的非线性分量进行定量评价，进而可以解析地得到由非线性分量或激励源产生并垂直于波导传播的声表面波的数量。该理论可推广到多通道波导声表面波卷积器。(3)我们发现了一种新的现象，即从压电基片上取代声表面波的点阵列产生声表面波的二次谐波分量。结果，二次谐波的传播方向可以通过点的频率和周期长度来控制。

项目成果

Y.Nakagawa: "Theoretical calculation of nonlinear effects in SAW waveguide" Ferroelectric materials and their applications. (1991)

Y.Nakakawa：“SAW波导中非线性效应的理论计算”铁电材料及其应用。

中川 恭彦: "導波路上のSAW非線形現象に対する理論解析" 日本音響学会研究発表会. 1-Q-5. (1992)

Yasuhiko Nakakawa：“波导上 SAW 非线性现象的理论分析”日本声学学会的研究报告 1-Q-5（1992 年）。

Y.Nakagawa: "Parametric Mixing Effects in Surface Acoustic Waves Caused by Gas Bubbles in Liquids." Physical Acoustics. 537-543 (1990)

Y.Nakakawa：“液体中气泡引起的表面声波的参数混合效应。”

中川 恭彦: "導波路上の弾性表面波非線形現象に対する理論解析" 電子情報通信学会誌(A). J76-A. 118-124 (1993)

Yasuhiko Nakakawa：“波导上声表面波非线性现象的理论分析”电子、信息和通信工程师学会期刊（A）118-124（1993）。

Yasuhiko NAKAGAWA: "Material constants of new piezoelectric Ta205 thin films" J.Appl.Phys.68. 556-559 (1990)

Yasuhiko NAKAGAWA：“新型压电 Ta205 薄膜的材料常数”J.Appl.Phys.68。