Fabrication of thin film like an education of an embryo by using the surface acoustic waves.

使用表面声波制造类似胚胎教育的薄膜。

• 批准号: 07455136
• 负责人: NAKAGAWA Yasuhiko
• 金额: $ 4.93万
• 依托单位: YAMANASHI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07455136/
• 关键词: Surface Acoustic Waves; Thin Film; Phase Grating; Thin Film Fabrication like an Education of An Embryo; 研究発表; 胎教

By depositing a thin film on a substrate in which a surface acoustic wave is excited, we can fabricate the thin film which shows a large refractive index and the photo elastic constants compared with the film which was deposited without the surface acoustic waves. This phenomenon is like an education of an embryo in mankind.As a results, we found a method of controlling the photo elastic constants of Nb205 thin film using a surface acoustic waves, which had not been reported until now. It was confirmed theoretically and experimentally that the photo elastic constants of Nb205 thin film increase 3.0 to 6.0 times when the surface acoustic wave is excited on the thin film during the sputtering process.We found more that a phase grating can be constructed by exciting the standing surface acoustic waves on a substrate during deposition of a Ta205 thin film by RF sputtering. The phase grating was formed with variations in film thickness of 1.78% and refractive index of 12.5% with a period of half the wavelength of surface acoustic waves. We can applied to the two dimensional phase grating using this phenomenon.These results are very interesting and applicable to the optical devices as a new application of surface acoustic waves.

通过在有表面声波激励的衬底上沉积薄膜，可以制备出比没有表面声波沉积的薄膜具有更大的折射率和光弹性常数的薄膜。因此，我们找到了一种利用表面声波来控制Nb205薄膜光弹常数的方法，这一方法目前还没有报道。从理论和实验上证实了在溅射过程中，当表面声波激励到Nb205薄膜上时，Nb205薄膜的光弹常数增加了3.0~6.0倍。此外，我们还发现，在射频溅射沉积Ta205薄膜的过程中，可以通过激励衬底上的驻留表面声波来构造位相光栅。形成了膜厚变化量为1.78%、折射率变化量为12.5%、周期为声表面波波长一半的位相光栅。利用这一现象，我们可以将其应用于二维位相光栅。这些结果是非常有趣的，并且适用于光学器件作为声表面波的一种新的应用。

项目成果

Y.Nakagawa: "Fabrication of Thin Film Phase Grating Using Suraface Acoustic Waves" J.J.Appl.Phys.Vol.35. pp.4999-5001 (1996)

Y.Nakakawa：“利用表面声波制造薄膜相位光栅”J.J.Appl.Phys.Vol.35。

中川 恭彦: "弾性表面波アシストによる位相格子の作成" 電子情報通信学会技術報告. US94-77. (1995)

Yasuhiko Nakakawa：“通过表面声波辅助创建相位光栅”IEICE 技术报告（1995）。

中川 恭彦: "弾性表面波アシストによる薄膜胎教形成法" 日本学術振興会弾性波素子技術第150委員会. 第46回. (1996)

中川泰彦：“利用表面声波辅助的薄膜形成方法”日本学术振兴会第150届声波器件技术委员会第46次会议（1996年）。

Yasuhiko NAKAGAWA: "Fabrication of Diffraction Grating Assisted by Surface Acoustic Wave." J.J.Appl.Phys.Vol.34. 2650-2652 (1995)

Yasuhiko NAKAGAWA：“表面声波辅助衍射光栅的制造”。

中川恭彦: "圧電薄膜/基板構造の作成と弾性表面波デバイスへの応用" 超音波TECHNO. No.3. 41-44 (1995)

Yasuhiko Nakakawa：“压电薄膜/基板结构的创建及其在表面声波器件中的应用”Ultrasonic TECHNO.3（1995）。