Fabrication of thin film like an education of an embryo by using the surface acoustic waves.

通过在激发表面声波的衬底上沉积薄膜，我们可以制造出与没有表面声波沉积的薄膜相比显示出大的折射率和光弹性常数的薄膜。我们发现了一种利用声表面波来控制Nb 205薄膜光弹性常数的方法，这是一种迄今未见报道的方法。从理论和实验上证实了在溅射过程中在Nb_（20）_5薄膜上激发声表面波时，其光弹常数增加了3.0 ~ 6.0倍，并进一步发现在射频溅射沉积Ta_（20）_5薄膜时，在衬底上激发声表面波可以构成位相光栅。形成的相位光栅的膜厚变化为1.78%，折射率变化为12.5%，周期为表面声波波长的一半。利用这一现象，我们可以将其应用到二维相位光栅中，这些结果作为声表面波的一种新的应用，在光学器件中是很有意义的。

By depositing a thin film on a substrate in which a surface acoustic wave is excited, we can fabricate the thin film which shows a large refractive index and the photo elastic constants compared with the film which was deposited without the surface acoustic waves. This phenomenon is like an education of an embryo in mankind.As a results, we found a method of controlling the photo elastic constants of Nb205 thin film using a surface acoustic waves, which had not been reported until now. It was confirmed theoretically and experimentally that the photo elastic constants of Nb205 thin film increase 3.0 to 6.0 times when the surface acoustic wave is excited on the thin film during the sputtering process.We found more that a phase grating can be constructed by exciting the standing surface acoustic waves on a substrate during deposition of a Ta205 thin film by RF sputtering. The phase grating was formed with variations in film thickness of 1.78% and refractive index of 12.5% with a period of half the wavelength of surface acoustic waves. We can applied to the two dimensional phase grating using this phenomenon.These results are very interesting and applicable to the optical devices as a new application of surface acoustic waves.