The preparation of a surface acoustic wave assist thin film phase grating and the application to the ultra micro optical system.

本研究的结果如下：(1)强调光弹性现象的发现。在溅射技术制备薄膜时，预先激发声表面波驻波，使薄膜的光弹性常数、薄膜厚度、折射率等物理性能得到提高。结果表明，Bragg衍射系统的光调制器效率提高了约6倍。(2)提出了利用表面声波辅助制作薄膜相位光栅的方法。薄膜形成后，在基片上预先激发声表面波驻波，容易形成薄膜相位光栅。薄膜厚度变化幅度约为1.78%，折射率变化幅度约为12.5%，变化幅度很大。在驻波周期内，表面声波的外加电场改变了衬底表面的介电常数，并在分子间产生了较大的粘附性。空间变化发生在薄膜厚度和折射率的结果。(3)二维相位光栅的制备与应用。利用正交声表面波驻波，制作了二维相位光栅。形成位置非常精确的网点，很容易形成理想的点阵。其中一块成为了理想的薄膜透镜，获得了在超微透镜上应用的可能性。(4)提出了有效利用表面声波功率的光偏振控制元件。提出了一种高效光可调滤光片。频段约0.5MHz。可用于光复用通信。此外，通过激发兰姆波来增加光波与声表面波的重叠面积，可以提高效率。(5)线性快速热退火法制备Ta_<>O_5单晶薄膜。结果表明，该方法可实现线性型快速热退火，并可在各向同性衬底上制备单晶薄膜。利用该方法，成功制备了Ta_2O_5单晶薄膜。制备的Ta_2O_5薄膜具有较大的双折射特性。它是一种铁弹性和铁电薄膜，可用于存储和光开关等新功能光学器件。少

Results got by this study are as follows.(1) The discovery of the phenomenon of which the photoelasticity is emphasized.Physical property such as photoelastic constant, film thickness, refractive index increases, when surface acoustic wave standing wave is beforehand excited in thin film preparation by sputtering technique. As the result, the efficiency of the optical modulator of the Bragg diffraction system increased at about 6 times.(2) The proposal of way of making of a thin film phase grating by the surface acoustic wave assist.A thin film phase grating is easily formed, when a thin film is established, while surface acoustic wave standing wave is beforehand excited on the substrate. The change of the film thickness is about 1.78% The refractive index variation is about 12.5% It is very big. Dielectric constant of the substrate surface changes by the external electric field of surface acoustic wave in period period of standing wave, and the difference occurs by it in the molecular … More adhesion. The spatial variation occurs at film thickness and refractive index as a result.(3) Preparation and application of the two-dimensional phase grating.Using orthogonalizing surface acoustic wave standing wave, the two-dimensional phase grating was made. Very accurately placed dot is formed, and the ideal lattice can be easily formed. One piece became an ideal thin film lens, and the application possibility to the ultra microlens was obtained.(4) The proposal of light polarization control element which effectively utilized the surface acoustic wave power.High-efficient light tunable filter was proposed. The frequency band is about 0.5MHz. It is available for the light multiplex communication. In addition, it was shown that it was improved at the efficiency, if the Lamb wave is excited in order to increase the overlap area of light wave and surface acoustic wave.(5) The preparation of the Ta_<>O_5 single crystal thin film by linear type rapid thermal annealing.It was shown that it proposed linear type rapid thermal annealing and can also make single crystal thin film in the isotropic substrate. Using this, it succeeded in the preparation of the Ta_2O_5 single crystal thin film. Made Ta_2O_5 thin film shows large birefringence. It was shown to be applicable for new function optical device such as memory and optical switching, because it was a ferroelastic and ferroelectric thin film. Less