The preparation of a surface acoustic wave assist thin film phase grating and the application to the ultra micro optical system.

声表面波辅助薄膜相位光栅的制备及其在超微光学系统中的应用。

• 批准号: 10450116
• 负责人: NAKAGAWA Yasuhiko
• 金额: $ 4.74万
• 依托单位: YAMANASHI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-10450116/
• 关键词: phase grating; surface acoustic wave; microlens; tantalum pentoxide single crystal; acousto-optic effect; linear type rapid thermal annealing; Ta_2O_5薄膜; SAWアシスト法; Tα_5O_5薄膜; 2次元位相格子; 光弾性定数

Results got by this study are as follows.(1) The discovery of the phenomenon of which the photoelasticity is emphasized.Physical property such as photoelastic constant, film thickness, refractive index increases, when surface acoustic wave standing wave is beforehand excited in thin film preparation by sputtering technique. As the result, the efficiency of the optical modulator of the Bragg diffraction system increased at about 6 times.(2) The proposal of way of making of a thin film phase grating by the surface acoustic wave assist.A thin film phase grating is easily formed, when a thin film is established, while surface acoustic wave standing wave is beforehand excited on the substrate. The change of the film thickness is about 1.78% The refractive index variation is about 12.5% It is very big. Dielectric constant of the substrate surface changes by the external electric field of surface acoustic wave in period period of standing wave, and the difference occurs by it in the molecular … More adhesion. The spatial variation occurs at film thickness and refractive index as a result.(3) Preparation and application of the two-dimensional phase grating.Using orthogonalizing surface acoustic wave standing wave, the two-dimensional phase grating was made. Very accurately placed dot is formed, and the ideal lattice can be easily formed. One piece became an ideal thin film lens, and the application possibility to the ultra microlens was obtained.(4) The proposal of light polarization control element which effectively utilized the surface acoustic wave power.High-efficient light tunable filter was proposed. The frequency band is about 0.5MHz. It is available for the light multiplex communication. In addition, it was shown that it was improved at the efficiency, if the Lamb wave is excited in order to increase the overlap area of light wave and surface acoustic wave.(5) The preparation of the Ta_<>O_5 single crystal thin film by linear type rapid thermal annealing.It was shown that it proposed linear type rapid thermal annealing and can also make single crystal thin film in the isotropic substrate. Using this, it succeeded in the preparation of the Ta_2O_5 single crystal thin film. Made Ta_2O_5 thin film shows large birefringence. It was shown to be applicable for new function optical device such as memory and optical switching, because it was a ferroelastic and ferroelectric thin film. Less

研究结果如下。(1)在溅射法制备薄膜时，预先激发声表面波驻波，使薄膜的光弹性常数、膜厚、折射率等物理性质增加，这是光弹性现象的发现。结果，布拉格衍射系统的光调制器的效率提高了约6倍。(2)提出了利用声表面波辅助制作薄膜相位光栅的方法，在制作薄膜时，预先在基片上激发声表面波驻波，容易形成薄膜相位光栅。薄膜厚度变化约为1.78%，折射率变化约为12.5%，变化很大。在驻波周期内，声表面波的外电场改变了基片表面的介电常数，并使基片表面的介电常数在分子内产生差异 ...更多信息 粘连结果，在膜厚度和折射率处发生空间变化。(3)二维相位光栅的制备及应用利用正交化声表面波驻波，制作了二维相位光栅。形成了非常精确的点，并且可以容易地形成理想的晶格。单片成为理想的薄膜透镜，获得了在超微透镜中应用的可能性。(4)提出了有效利用声表面波功率的光偏振控制元件，以及高效光可调谐滤波器。频带约为0.5MHz。它可用于光多路通信。此外，还表明，如果激发兰姆波以增加光波和表面声波的重叠面积，则效率得到提高。(5)采用线性快速热退火法制备Ta_<>O_5单晶薄膜，结果表明，该方法提出了线性快速热退火法，也可以在各向同性衬底上制备单晶薄膜。利用此方法成功地制备了Ta_2O_5单晶薄膜。制备的Ta_2O_5薄膜具有较大的双折射。由于它是一种铁弹性和铁电性的薄膜，因此它在存储器、光开关等新型功能光学器件中有着广阔的应用前景。少

项目成果

Y.Nakagawa: "Enhancement of photoelastic constant of optical thin film waveguide assisted by SAW"Ultrasonics. 38. 590-593 (2000)

Y.Nakakawa：“SAW辅助光学薄膜波导的光弹性常数的增强”超声波。

Y.Nakagawa,M.Watanabe,M.Yawata,S.Kakio: "Fabrication of a Thin Film Phase Grating Assisted by Surface Acoustic Waves"Electronics and Communications in Japan. 82. 26-33 (1999)

Y.Nakakawa、M.Watanabe、M.Yawata、S.Kakio：“表面声波辅助薄膜相位光栅的制造”日本电子与通信。

Y.Nakagawa,M.Yawata,Kakio: "Enhancement of photoelastic constant of optical thin film waveguide assisted by SAW"Ultrasonics. 38. 590-593 (2000)

Y.Nakakawa，M.Yawata，Kakio：“SAW辅助光学薄膜波导的光弹性常数增强”超声波。

Y.Nakagawa: "Dependence on waveguide width of elastic convolver efficiency"16th International Congress on Acoustics. 4pPAc6. 2303-2304 (1998)

Y.Nakakawa：“弹性卷积器效率对波导宽度的依赖性”第十六届国际声学大会。

中川恭彦,渡辺昌彦,垣尾省司: "弾性表面波アシストによる薄膜位相格子の作成"電子情報通信学会論文誌. J80-A. 1782-178* (1997)

Yasuhiko Nakakawa、Masahiko Watanabe、Shoji Kakio：“通过表面声波辅助创建薄膜相位光栅”电子、信息和通信工程师学会汇刊 J80-178* (1997)。