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Production of Tin Films by Ion Beam Mixing Method and Clarification of Its Fatigue Fracture

离子束混合法生产锡膜及其疲劳断裂的澄清

基本信息

批准号：
02650058
负责人：
MURAKAMI Ri-ichi
金额：
$ 1.22万
依托单位：
The University of Tokushima
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650058/
关键词：
Ion Beam Technology Surface Modification Ceramic Thin Film Fatigue Life Film Hardness Fraction and Wear Adhesive Strength イオンビ-ム疲労持性耐摩擦・摩耗表面改貭疲労強度フラクトグラフィ-

项目摘要

The ceramic thin films produced by ion beam technology, can modify the mechanical, optical, electronic and chemical properties. In the present study, two ion beam technologies were used to obtain the TiN films and CrN films. Such ceramic thin films were coated onto 600 MPa grade high tensile strength steel with varying the structure, compostion and film thickness. In dynamic mixing method, the ratio of Ti to N in the film can be changed by the deposition condition. When the ratio value of film is 1 : 1, there is the greatest hardness among the several thin films. The hardness decreases with increasing volume fraction of Ti. Furthermore, the structures of TiNx films depend on the mixture of TiN and Ti_2N and show more fine structure when the volume fraction of TiN increases. In this case, the hardness of film increases with increasing the volume fraction of TiN.The fatigue behavior depends on the coating thin film. When the TiN film is produced onto the steel, the fatigue life enlarges. Such a fatigue behavior results from the fatigue crack initiation process. Coating the film delays the crack initiation. The retardation of crack initiation markedly depends on the film structure and hardness. When the film structure is fine and its hardness is great, the fatigue life is strongly enhanced by the film deposition. Then, the fatigue life increases with laminating the thin film. The compressive residual stress into the film arise from the lamination of film, and then the film structure becomes more fine.

利用离子束技术制备陶瓷薄膜，可以改变陶瓷材料的机械、光学、电学和化学性能。在本研究中，两种离子束技术被用来获得TiN膜和CrN膜。在600 MPa级高抗拉强度钢表面制备了不同结构、成分和膜厚的陶瓷薄膜。在动态混合法中，薄膜中Ti和N的比例可以通过沉积条件来改变。当膜厚比为1：1时，薄膜的硬度最大。硬度随Ti体积分数的增加而降低。TiNx薄膜的结构取决于TiN和Ti_2N的混合物，随着TiN体积分数的增加，薄膜的结构更加精细。在这种情况下，薄膜的硬度随着TiN体积分数的增加而增加，疲劳行为取决于薄膜的厚度。当在钢上产生TiN膜时，疲劳寿命增加。这种疲劳行为是由疲劳裂纹萌生过程引起的。涂覆薄膜延迟裂纹的萌生。裂纹萌生的延迟主要取决于薄膜的结构和硬度。当膜层组织细小、硬度大时，疲劳寿命显著提高。然后，疲劳寿命随着层叠薄膜而增加。由于薄膜的分层作用，薄膜内部产生了压应力，薄膜结构变得更加精细。