EVALUATION OF FRICTION-WEAR PROPERTIES OF DLC FILMS PRODUCED BY PLASMA CVD

采用等离子体气相沉积法和离子镀法在不锈钢、低碳钢、高速工具钢和纯钛上沉积TiN薄膜、类金刚石碳膜和金刚石膜。讨论了陶瓷薄膜、DLC薄膜和金刚石薄膜的附着力、硬度、摩擦磨损性能及沉积条件。所得结果如下：1) TiN层合膜的粘附和摩擦磨损性能与TiN的微观结构、层合次数和层合顺序密切相关。2)用等离子体气相沉积法研究了纯钛上金刚石的生成。金刚石的生成受基体几何形状的影响，从而改变了气体的流动。然后，在纯钛上用类金刚石碳生长金刚石晶体。3)采用射频等离子体CVD技术在不锈钢表面镀上硅膜，制备了类金刚石碳膜。DLC膜与衬底之间的夹层对DLC膜的附着力有很大的影响。DLC膜的磨损性能取决于膜的附着力。4)采用离子镀法在高速工具钢表面直接沉积类金刚石碳膜。涂层DLC膜可提高基体的耐磨性能。但不同材料对磨损的改善程度不同。

TiN thin films, diamond like carbon films and diamond films were deposited by using plasma CVD and ion plating methods on the stainless steel, mild steel, high speed tool steel and pure titanium. The adhesion, hardness, friction and wear properties of ceramic thin films, DLC films and diamond films were discussed with the deposition condition and nucreation. The obtained results were as follows.1) Adhesion and friction-wear behavior of laminated TiN films strongly depended on the microstructure of TiN,the laminated number, the order of lamination.2) The nucreation of diamond on pure titanium was discussed by using plasma CVD.The nucreation of diamond was affected by the geometry of substrate which changed the gas flow. Then, the diamond crystal was grown with diamond like carbon on pure titanium.3) The diamon like carbon films were deposited on stainless steel with silicon film by using radio frequency plasma CVD.The adhesion of DLC films was strongly effected by the interlayr between DLC film and substrate. The wear behavior of DLC films depended on the adhesion of films.4) The deamond like carbon films was directly deposited on high speed tool steel using ion plating method. The wear properties of substrate were improved by the coating DLC films. But, the improvement of wear was different with the opposite materials.