Development of Deposition System of Size-Controlled Clusters

本研究的目的是建立一个质量选择性金属团簇沉积系统。得到的结果总结如下。1）团簇沉积系统的构建构建图1中示意性地示出的团簇沉积系统被构建。该系统由场离子源、团簇源、四极质谱计、离子探测系统和差动抽运系统组成。整个系统由不锈钢制成，可烘烤。2）Li和Zn团簇的场离子质谱沉积质量选择性金属团簇的先决条件是检测其场离子。因此，场离子质谱的锂和锌团簇，使用构建的系统。关键的结果是愚蠢的。1)Li团簇蒸气中含有被认为是禁团簇的Li_3。2)Zn_2的强度分布并不能反映Zn同位素的相对丰度，表明二聚体形成时存在同位素组合的选择性。3）Zn二聚体薄膜的沉积成功地将Zn二聚体存款在环氧树脂薄膜上。Zn膜是非晶态的，因此不同于通常具有多晶或单晶结构的单体Zn膜。因此，质量选择性团簇沉积有望提供具有新颖结构的金属薄膜。

The aim of this study was to construct a deposition system of mass-selected metal clusters. The results obtained are summarized as floows.1) Construction of cluster-deposition systemThe cluster-deposition system schematically shown in Fig. 1 was constructed. The system is comprised of field ion source, cluster-beam source, quadrupole mass spectrometer, ion detection system and differential pumping system. The entire system is made of stainless stell, thus being bakable.2) Field Ion Mass spectrometry of Li and Zn clustersThe prerequisite for depositing mass-selected metal clusters is to detect their field ions. Field ion mass spectrometry was therefore attempted for Li and Zn clusters, using the system constructed. The key results were as foolows. 1) Li_3, which is thought to be forbidden cluster, was confirmed to be involved in Li cluster vapors. 2) The intensity distribution of Zn_2 did not reflect the relative abundance of Zn isotopes, suggesting a selectivity of isotope combination in dimer formmation.3) Deposition of Zn dimer filmsZn dimers were successfully deposit on epoxy films. Zn film was amorphous, and thus differed structually from monomer Zn films which usually possess a poly- or monocrystalline structure. Mass-selected cluster deposition is thus expected to provide metal films with novel structure.