Development of Deposition System of Size-Controlled Clusters

尺寸控制团簇沉积系统的开发

• 批准号: 04402020
• 负责人: OKUYAMA Fumio
• 金额: $ 10.11万
• 依托单位: Nagoya Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (A)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04402020/
• 关键词: Cluster; New Material; Mass Spectrometry; Thin Film

The aim of this study was to construct a deposition system of mass-selected metal clusters. The results obtained are summarized as floows.1) Construction of cluster-deposition systemThe cluster-deposition system schematically shown in Fig. 1 was constructed. The system is comprised of field ion source, cluster-beam source, quadrupole mass spectrometer, ion detection system and differential pumping system. The entire system is made of stainless stell, thus being bakable.2) Field Ion Mass spectrometry of Li and Zn clustersThe prerequisite for depositing mass-selected metal clusters is to detect their field ions. Field ion mass spectrometry was therefore attempted for Li and Zn clusters, using the system constructed. The key results were as foolows. 1) Li_3, which is thought to be forbidden cluster, was confirmed to be involved in Li cluster vapors. 2) The intensity distribution of Zn_2 did not reflect the relative abundance of Zn isotopes, suggesting a selectivity of isotope combination in dimer formmation.3) Deposition of Zn dimer filmsZn dimers were successfully deposit on epoxy films. Zn film was amorphous, and thus differed structually from monomer Zn films which usually possess a poly- or monocrystalline structure. Mass-selected cluster deposition is thus expected to provide metal films with novel structure.

本研究的目的是构建质量选择金属簇的沉积系统。所得结果总结如下。 1)簇沉积系统的构建构建了如图1示意性所示的簇沉积系统。该系统由场离子源、簇束源、四极杆质谱仪、离子检测系统和差动泵浦系统组成。整个系统由不锈钢制成，因此可烘烤。2）Li和Zn团簇的场离子质谱分析沉积质量选择的金属团簇的前提是检测它们的场离子。因此，尝试使用所构建的系统对锂和锌簇进行场离子质谱分析。关键结果是愚蠢的。 1)被认为是禁带团簇的Li_3被证实存在于Li团簇蒸气中。 2)Zn_2的强度分布并不能反映Zn同位素的相对丰度,表明同位素组合在二聚体形成中具有选择性。3)Zn二聚体薄膜的沉积Zn二聚体成功沉积在环氧薄膜上。 Zn膜是无定形的，因此在结构上不同于通常具有多晶或单晶结构的单体Zn膜。因此，质量选择簇沉积有望提供具有新颖结构的金属薄膜。

项目成果

H.Hoshino,M.Tanemura and F.Okuyama: "A new mass spectromtery system for analyzing metal cluster beams" Rev.Sci.Instruments. (to be published).

H.Hoshino、M.Tanemura 和 F.Okuyama：“一种用于分析金属簇束的新型质谱系统”Rev.Sci.Instruments。

"A New mass spectrometery system for anlyzing metal cluster beams" Rev.Sci.Instrum.to be published. (1994)

“用于分析金属簇束的新型质谱系统”Rev.Sci.Instrum.即将出版。