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Constructing a field-emission (FE) x-ray tube

构建场发射 (FE) X 射线管

基本信息

批准号：
08555017
负责人：
OKUYAMA Fumio
金额：
$ 6.4万
依托单位：
Nagoya Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555017/
关键词：
x-ray camera Field emission x-ray technology Vacuum microelectronics スパッタリング

项目摘要

This project aimed at constructing an x-ray camera equipped with a multiple field cathode (MFC) as the electron source. The construction of the x-ray camera and its test were completed before March 1, 1999.The total system of our x-ray camera is basically composed of camera chamber, electron source and pumping system. The respective components are outlined as follows.1) x-ray cameraThe x-ray camera is entirely composed of a stainless-steel cylindrical chamber with seven viewing and connection ports. Inside the chamber are installed an Al target and a Grazer lense, the latter of which is water-cooled.2) Electron sourceThe FE emitter, or the electron source, is exchangeable without breaking the main vacuum. Its position adjustment is done with the aid of a manipulator, and electrons emitted from it are focused onto the target through the Glazer lense.3) Pumping systemThe camera chamber is pumping down to -10^<-7> Torr, with the aid of two turbomolecular pumps. The field cathode employed were Mo meshes simply cut by a scissor. It is emphasized that sharp x-ray images were obtained using such a simple mesh emitter. This is really "epoch-making" because no x-ray image has been recorded so far by using field electrons. One undesirable result is that the chamber pressure remained at the order of 10^<-7> Torr because of an 0-ring to combine the chamber and the high-voltage insulator. Since field emission is a typical surface phenomenon, a ultrahigh vacuum (UHV) is demanded to maintain a stable operation of the electron source. Our next step is thus to construct a UHV x-ray camera based on a variety of experiences that we had in the present project.

本项目旨在构建一台以多场阴极(MFC)为电子源的X射线相机。在1999年3月1日之前完成了X射线相机的建造和测试。我们的X射线相机的整个系统基本上由照像室、电子源和泵浦系统组成。X射线相机由一个带有七个观察口和连接口的不锈钢圆柱形腔体组成。室内安装了一个铝靶和一个Grazer透镜，后者是水冷的。2)电子源Fe发射器或电子源可以在不破坏主真空的情况下交换。它的位置调整是在机械手的帮助下完成的，从它发出的电子通过玻璃透镜聚焦到靶子上。3)泵浦系统相机腔在两个涡轮分子泵的帮助下泵送到-10；-7；托尔。所用的场阴极是用剪刀简单切割的钼网。强调指出，使用这种简单的网格发射器就可以获得锐利的X射线图像。这真的是“划时代的”，因为到目前为止还没有用场电子记录的X射线图像。一个令人不快的结果是，由于将腔体和高压绝缘体结合在一起的0环，腔体压力保持在10^&lt；-7；Torr量级。场发射是一种典型的表面现象，需要超高真空(UHV)来维持电子源的稳定运行。因此，我们的下一步是根据我们在本项目中获得的各种经验建造一台特高压X射线相机。