Construction of a three dimensional atom probe and its applications to materials research

三维原子探针的构建及其在材料研究中的应用

• 批准号: 04555154
• 负责人: HONO Kazuhiro
• 金额: $ 9.41万
• 依托单位: Institute for Materials Research, Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04555154/
• 关键词: atom probe; field ion microscope; three dimensional atom probe; nanostructure; FIM; APFIM

We have constructed a three dimensional atom probe and applied this instrument for characterizing microstructures of various metallic materials. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom probe (PoSAP) , which are controlled with a CAMAC based controlling system interfaced with a Macintosh computer. After the evaluation of the basic performances of the reflectron atom probe and the position sensitive atom probe, we have employed this instrument for studing microstructures of some selected nanostructured magnetic materials. Three diemensional atom probe analysis of Co-Cr thin films revealed that nanoscale compositional fluctuations were present in the Co-22at.%Cr thin films sputter-deposited at elevated temperatures. The lammer-like ferromagnetic and paramagnetic phases were found to coexist within a crystal grain. These nanoscale phases were directly visualized in a three dimensional space with atomic spatial resolution. Application of this instrument to charactrizing the microstructural evoluiton in some nanocrystalline magnetic materials revealed mechanisms how nanocrystalline microstructure evolved by primary crystallization of alloys. We have also shown how ferromagnetic particles evolve by annealing Cr-Fe alloys, and correlated the microstructure with the magnetoresistance behovior observed in this alloy system.

我们研制了一种三维原子探针，并应用该仪器对各种金属材料的显微组织进行了表征。这种新型原子探针由反射式飞行时间原子探针（ToFAP）和位置敏感原子探针（PoSAP）组成，它们由基于CAMAC的控制系统与Macintosh计算机接口控制。在评价了反射式原子探针和位置灵敏原子探针的基本性能后，我们用该仪器对几种纳米磁性材料的微结构进行了研究。Co-Cr薄膜的三维原子探针分析表明，Co-22 at.%铬薄膜的高温化学沉积。层状铁磁相和顺磁相共存于同一晶粒内。这些纳米级相直接在具有原子空间分辨率的三维空间中可视化。应用该仪器对某些纳米晶磁性材料的显微组织演变进行了表征，揭示了合金初晶化过程中纳米晶组织演变的机理。我们还展示了铁磁颗粒如何通过退火Cr-Fe合金演变，并将微观结构与在该合金系统中观察到的磁电阻行为相关联。

项目成果

K.Hono,K.Hiraga,Q.Wang,A.Inoue and T.Sakurai: "The microstructure evolution of Fe73.5Si13.5B9Nb3Cu1 nanocrystalline soft magnetic material" Acta Metall.Mater. 40. 2137-2147 (1992)

K.Hono、K.Hiraga、Q.Wang、A.Inoue 和 T.Sakurai：“Fe73.5Si13.5B9Nb3Cu1 纳米晶软磁材料的微观结构演化”Acta Metall.Mater。

K. Hono: "Solute partitioning in Al-Ni-Ce(-Cu)partially crystallized metallic glasses" Scripta Metall. Mater.32. 191-196 (1995)

K. Hono：“Al-Ni-Ce(-Cu)部分结晶金属玻璃中的溶质分配”Scripta Metall。

K.Hono, Y.Maeda, S.S.Babu and T.Sakurai: ""Compositional inhomogeneities in sputtered Co-Cr magnetic thin films studied by atom probe field ion microscopy"" J.Appl.Phys.76. 8025-8031 (1994)

K.Hono、Y.Maeda、S.S.Babu 和 T.Sakurai：“通过原子探针场离子显微镜研究溅射 Co-Cr 磁性薄膜中的成分不均匀性”J.Appl.Phys.76。

宝野和博: "三次元アトムプローブとその応用" 日本金属学会報. 34(印刷中). (1995)

Kazuhiro Takarano：“三维原子探针及其应用”日本金属研究所通报 34（出版中）。

K.Hono et al.: "Atom probe compositional analysis of Co-Cr sputtered magnetic thin films" Appl.Phys.Lett.62. 2504-2506 (1993)

K.Hono 等人：“Co-Cr 溅射磁性薄膜的原子探针成分分析”Appl.Phys.Lett.62。