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DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY

DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY
X射线能谱散射形貌学的科学研究进展
批准号:
04558016
负责人:
CHIKAURA Yoshinori
金额:
$10.05万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Developmental Scientific Research (B)
财政年份:
1992
资助国家:
日本
项目状态:
已结题
起止时间:
1992 至 1994

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中文摘要
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英文摘要
This research has two main aims ; development of X-ray scattering topography involving local spectroscopy and instrumentational research for improving the spatial resolution.As to the first aspect, X-ray scattering topography using multichannel detectors as a position sensitive detector and a energy dispersive solid state detector is described. The system involves measuring the X-ray spectrum at each local place. The new topography system adds another dimension to X-ray scattering topography proposed by the present authors. It produces topographs constructed with certain physical quantities, such as crystal orientatin, as well as an ordinaly integrated intensity map. Included in the paper is the orientation topography for an Fe=3%Si alloy single crystal, structural observation of a human chololith and the non-destructive testing of a amorphous rubber tire. Emphasis is placed on the first proporsal of X-ray spectroscopic topography.The second aspect of the research is instrumentations for improving spatial resolution. Although spatial resolution is the most essential factor determining the function of X-ray topography, it has not been improved in 30 years in spite of increasing requirement for highly-resolvable topography in materials science. X-ray scattering topography using a microbeam is a method capable of overcomimg this resolution problem. Becouse the maximum resolution of an apparatus using a seled-off tube is limited to 20 mum, we designed and constructed scattering topography equipment using a synchrotron radiation microbeam. In the experiment, the slit system forms the microbeam 7mum in diameter. We observed a cellulose distribution in bamboo as a testing material. When the scanning step was 2mum, we attained spatial resolution less than 5mum.
期刊论文(25)
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会议论文
Yosifumi Suzuki, Yoshinori Chikaur and Hideki Kii: "X-Ray Scattering Topographic Study of Lattice-mismatched Compound Semiconductor Heteroepitaxial Layrs" J.Phys.D : Appl.Phys.26. 86-91 (1993)
Yosifumi Suzuki、Yoshinori Chikaur 和 Hideki Kii:“晶格失配化合物半导体异质外延层的 X 射线散射形貌研究”J.Phys.D:Appl.Phys.26。
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通讯作者:
Yoshinori Chikaura, Yoshifumi Suzuki and Yoshitake Udagawa: "X-Ray Scattering Topography involving Local Spectroscopy" J.Phys.D : Appl.Phys. 26. 2212-2218 (1993)
Yoshinori Chikaura、Yoshifumi Suzuki 和 Yoshitake Udakawa:“涉及局部光谱学的 X 射线散射形貌” J.Phys.D :Appl.Phys。
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通讯作者:
Takeo Hondoh, Tetsuya Ishikawa, Yoshinori Chikaura, Osamu Nittono and Satosi Iida: "X-ray topography" SPring-8 Project Nol(Scientific Program 1993). 119-128 (1993)
Takeo Hondoh、Tetsuya Ishikawa、Yoshinori Chikaura、Osamu Nittono 和 Satosi Iida:“X 射线地形学”SPring-8 项目 Nol(科学计划 1993)。
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通讯作者:
近浦吉則ら: "理工学基礎課程 物理学実験" 東京教学社, 234 (1994)
近浦义典等:《理工基础课物理实验》东京京学社,234(1994)
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24
    Advanced Formation Technique of High Energy Parallel Synchrotron Microbeam with white Spectrum, and its Application to Visualization of Internal Structure of Electronic Devices and Biomaterials
    • 批准号:
      16360012
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $8.0万
    • 财政年份:
      2004
    • 负责人:
      CHIKAURA Yoshinori
    • 依托单位:
    Formation of High energy White Synchrotron Microbeam and its Application to Micro-Imaging of Electronic Devices
    • 批准号:
      14550012
    • 项目类别:
      Grant-in-Aid for Scientific Research (C)
    • 资助金额:
      $2.24万
    • 财政年份:
      2002
    • 负责人:
      CHIKAURA Yoshinori
    • 依托单位:
    Formation of High energy white and parallel microbeam and its application to Surface Spectro-Scattering Topography
    • 批准号:
      11650019
    • 项目类别:
      Grant-in-Aid for Scientific Research (C)
    • 资助金额:
      $2.37万
    • 财政年份:
      1999
    • 负责人:
      CHIKAURA Yoshinori
    • 依托单位:
    Trial Construction of Scattering Radiographic Apparatus and its Application to observation of Microdefectsin Silicon using Synchrotron X-Radiation
    • 批准号:
      62580041
    • 项目类别:
      Grant-in-Aid for General Scientific Research (C)
    • 资助金额:
      $1.6万
    • 财政年份:
      1987
    • 负责人:
      CHIKAURA Yoshinori
    • 依托单位:
    海外基金