DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY

本研究的主要目的有两个：发展局域能谱的X射线散射形貌和提高空间分辨率的仪器研究。对于第一个方面，介绍了使用多通道探测器作为位置灵敏探测器和能量色散固态探测器的X射线散射形貌。该系统包括测量每个地方的X射线光谱。新的地形系统为作者提出的X射线散射地形增加了另一个维度。它产生由某些物理量构成的地形图，如晶体取向图，以及通常综合的强度图。本文介绍了Fe=3%Si合金单晶的取向形貌、人体胆石的结构观察和非晶态橡胶轮胎的无损检测。重点放在X射线能谱地形的第一比例。研究的第二个方面是提高空间分辨率的仪器。虽然空间分辨率是决定X射线形貌术性能的最基本因素，但尽管材料科学对高分辨率形貌术的要求越来越高，但它在过去的30年里并没有得到提高。微束X射线散射形貌术是一种能够克服这一分辨率问题的方法。由于采用分束管的装置最大分辨率限制在20微米，因此我们设计并制作了同步辐射微束散射式形貌仪。在实验中，狭缝系统形成了直径为7微米的微光束。以竹子为试材，观察了纤维素在竹子中的分布。当扫描步长为2微米时，空间分辨率小于5微米。

This research has two main aims ; development of X-ray scattering topography involving local spectroscopy and instrumentational research for improving the spatial resolution.As to the first aspect, X-ray scattering topography using multichannel detectors as a position sensitive detector and a energy dispersive solid state detector is described. The system involves measuring the X-ray spectrum at each local place. The new topography system adds another dimension to X-ray scattering topography proposed by the present authors. It produces topographs constructed with certain physical quantities, such as crystal orientatin, as well as an ordinaly integrated intensity map. Included in the paper is the orientation topography for an Fe=3%Si alloy single crystal, structural observation of a human chololith and the non-destructive testing of a amorphous rubber tire. Emphasis is placed on the first proporsal of X-ray spectroscopic topography.The second aspect of the research is instrumentations for improving spatial resolution. Although spatial resolution is the most essential factor determining the function of X-ray topography, it has not been improved in 30 years in spite of increasing requirement for highly-resolvable topography in materials science. X-ray scattering topography using a microbeam is a method capable of overcomimg this resolution problem. Becouse the maximum resolution of an apparatus using a seled-off tube is limited to 20 mum, we designed and constructed scattering topography equipment using a synchrotron radiation microbeam. In the experiment, the slit system forms the microbeam 7mum in diameter. We observed a cellulose distribution in bamboo as a testing material. When the scanning step was 2mum, we attained spatial resolution less than 5mum.