Trial Construction of Scattering Radiographic Apparatus and its Application to observation of Microdefectsin Silicon using Synchrotron X-Radiation

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The hardware and soft ware of a microcomputer-aided system of X-Ray scattering rdiography with a solid state detector has been described. The system uses finely collimated X-ray beam with a mechanical scanning of the specimen, and give scattering radiographs in color after various image processings.The system capability has been demonstrated in observation of a silicon single crystal with and without a GaAs epitaxial layer, and various commercially used materials.The major aim in observing silicon single crystals is to detect microdefects using diffuse scattered X-ray. The experiment is in progress using the above newly costructed system of SR.In order to compare the aittuse scattering racllographs with the other method, plane-wave topography experiments have were made in Photon Factory, Tsukuba, Japan. We succeeded to observe microdefects(asgrown) in silicon crystals as thick as the extinction distance