Development of a Novel Multi-Functionalized System for Surface Reaction Analysis in Photo excited Epitaxy

开发用于光激发外延表面反应分析的新型多功能系统

• 批准号: 05554019
• 负责人: IWASAWA Yasuhiro
• 金额: $ 6.08万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05554019/
• 关键词: photo induced epitaxy; electron stimulated desorption; reflection absorption infrared spectroscopy; scanning tunneling microscopy; solid surface; surface reaction; silicon; organometallic compound; 光励起選択エピタキシー; 角度分解刺激脱離イオン分光法; 反射型赤外吸収分光法; 飛行時間フ

The investigators developed a Time-of-Flight Fourier Transformed Ion Energy Analyzer for space-resolved and energy-resolved observation of products in electron-or photo-stimulated desorption. In the present project, a multi-functionalized ultrahigh vacuum system was built to observe the coordination, energy state, and structure of absorbed reaction intermediates, by combining the analyzer with an Reflection Absorption Infared Spectroscope (RAIRS) .The RAIRS with a reaction chamber allowed us to observe in-situ surface reaction in atmospheric reactant ambient. The ion analyzer operated with pulsed electron beam enabled the detection of reaction intermediate in a time resolution as small as 20 ms.As the developing the system, thermal and photo induced reaction of alkygallium compounds on a Si (111) - (7*7) surface was studied by scanning tunneling spectroscopy (STM) . The decomposition of individual trimethylgallium and triethylgallium molecule was imaged. The manipulation of adsorbed formate, a simple organic molecule, was also successfully examined on TiO_2 (110) .

研究人员开发了一种飞行时间傅立叶变换离子能量分析仪，用于对电子或光刺激解吸中的产物进行空间分辨和能量分辨观察。在本项目中，通过将分析仪与反射吸收红外光谱仪（RAIRS）相结合，搭建了一个多功能超高真空系统，用于观察吸收反应中间体的配位、能态和结构。带有反应室的RAIRS使我们能够观察大气反应物环境中的原位表面反应。采用脉冲电子束操作的离子分析仪能够以小至20 ms的时间分辨率检测反应中间体。随着系统的开发，通过扫描隧道光谱（STM）研究了烷基镓化合物在Si（111）-（7*7）表面上的热诱导和光诱导反应。对单个三甲基镓和三乙基镓分子的分解进行了成像。吸附甲酸盐（一种简单的有机分子）的操作也成功地在 TiO_2 (110) 上进行了研究。

项目成果

佐々木岳彦: "表面吸着種解析法としての電子刺激脱離法の最近の発展" 化学. 49. 450-451 (1994)

Takehiko Sasaki：“电子刺激解吸法作为分析表面吸附物质的方法的最新进展”，Chemistry 49. 450-451 (1994)。

Takehiko Sasaki: "A Reactive Oxygen Adlayer on Cu ( 110 ) at 100K" Surface Science. 316. L1081-L1087 (1994)

Takehiko Sasaki：“100K 下 Cu (110) 上的活性氧吸附层”表面科学。

Ken-ichi Fukui: "Chemisorption of CO and H_2 on clean and oxygen-modified Mo ( 112 )" Surface Science. 281. 241-252 (1993)

Ken-ichi Fukui：“清洁和氧改性的 Mo (112) 上 CO 和 H_2 的化学吸附”表面科学。

Junji Inukai: "Photochemical Decomposition of Triethylgallium on Si ( 111 ) Studied by Means of STM, LEED, AES and Mass Spectroscopy" Japanese Journal of Applied Physics. 32. 1768-1771 (1993)

Junji Inukai：“通过 STM、LEED、AES 和质谱研究 Si (111) 上三乙基镓的光化学分解”日本应用物理学杂志。

Takehiko Sasaki: "A Reactive Oxygen Adlayr on Cu (100) at 100 K" Surface Science. 361. L1081-L1087 (1994)

Takehiko Sasaki：“100 K 下 Cu (100) 上的活性氧 Adlayr”表面科学。