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A QUANTITATIVE STUDY OF ELECTRON -STIMULATED- DESORPTION SPECTROSCOPY USING A LIGHT EXCITATION

光激发电子受激解吸光谱的定量研究

基本信息

批准号：
07555338
负责人：
UEDA Kazuyuki
金额：
$ 2.37万
依托单位：
TOYOTA TECHNOLOGICAL INSTITUTE
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555338/
关键词：
TOF-ESD FTIR ESD ELECTRON STIMULATED DESORPTION HYDROGEN ADSORPTION HYDROGEN DETECTION RHODIUM SILICON

项目摘要

The system of time-of-flight type electron-stimulated desorption (TOF-ESD) spectroscopy is very useful to detect hydrogen on solid surfaces in spite of its simple construction. However, a quantitative analysis is still controversial due to high renutralization of desorbedions depending on species and surface conditions. Therefore, in order to establish a quantitative analysis, it is necessary to calibrate for the ESD signal intensity to amounts of adsorbate.Though a post ionization method by for desorbed particles using a laser beam had been planned originally, it was abandoned to set up in this project due to a squeezed budget. Conquering this, we have tried to compare the ESD yield from adsorbates to absorbance of infrared light by vibration intensity of molecules by using a Fuorie-Transform Infrared Spectroscopy (FTIR). An in-situ measurement of ESD and FTIR have been firstly constructed here. An experiment for CO on metals revealed good relationship. However, in the case of H on Si, a signal intensity of a FTIR was too small to calibrate adsorption amounts. We have compromised to calibrate for adsorbed hydrogen on silicon surface by the result of E1astic Recoil Detection Analysis (ERDA) comparing with a TDS result. As applications of TOF-ESD,hydrogen mediated heteroepitaxy and a two dimensional hydrogen analysis have been accomplished.

飞行时间型电子刺激解吸（TOF-ESD）光谱系统尽管结构简单，但对于检测固体表面上的氢非常有用。然而，由于解吸离子的高度再中和取决于物种和表面条件，定量分析仍然存在争议。因此，为了建立定量分析，有必要根据吸附物的量来校准 ESD 信号强度。虽然最初计划使用激光束解吸颗粒的后电离方法，但由于预算紧张而放弃在该项目中建立。为了解决这个问题，我们尝试使用傅里叶变换红外光谱 (FTIR) 来比较吸附物的 ESD 产量与分子振动强度对红外光的吸光度。这里首先构建了 ESD 和 FTIR 的原位测量。 CO 对金属的实验显示出良好的关系。然而，在Si上的H的情况下，FTIR的信号强度太小而无法校准吸附量。我们通过 E1astic 反冲检测分析 (ERDA) 的结果与 TDS 结果进行比较来校准硅表面吸附的氢。作为TOF-ESD的应用，氢介导异质外延和二维氢分析已经完成。