Precise determination of surface process using a new real time surface imaging system

使用新型实时表面成像系统精确确定表面过程

基本信息

批准号：
09440195
负责人：
IWASAWA Yasuhiro
金额：
$ 3.26万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09440195/
关键词：
XPEEM PEEM MEM Emission electron surface imaging system in situ observation STM ESDIAD リアルタイムイメージング反応プロセス制御 XPEEN

项目摘要

To invent next generation semiconductor devices and perfect catalysts with 100% selectivity and 100% conversion, it is indispensable to establish a technique to fabricate surfaces precisely controlled on an atomic/molecular level. To attain this goal, it is necessary not only to follow surface chemical phenomena on an atomic/molecular level but to reveal the behavior of ensembles and whole processes of chemical reaction on the surface. In particular, one can understand overall surface reaction processes by investigation of desorbed reaction products and their angle distribution. On this standpoint of view we developed an in-situ real time emission electron imaging system with multiple excitation sources and observed surface phenomena on an atomic scale during the surface reaction using the in-situ real time imaging system together with STM (Scanning tunneling microscopy) and ESDIAD (electron stimulated desorption ion angle distribution). As a result, we have succeeded in visualizing real-time surface phenomena during the reaction processes on the surface of semiconductors and metals by means of PEEM (photo emission electron microscopy) and MEM (mirror electron microscopy) and also observing the behavior of the adsorbates on an atomic scale. We revealed the its interaction of the surface and the decomposition process of methanol.

要发明下一代半导体设备和具有100％选择性和100％转化率的完美催化剂，建立一种在原子/分子水平上精确控制的表面是必不可少的。为了实现这一目标，不仅有必要在原子/分子水平上遵循表面化学现象，而且还必须揭示合奏和整个化学反应过程的行为。特别是，人们可以通过研究解吸反应产物及其角度分布来理解总体表面反应过程。从这个角度来看，我们开发了一个具有多个激发源的原位实时发射电子成像系统，并在表面反应期间使用位于原子的实时成像系统与STM（扫描隧道显微镜）和ESDIAD（电子刺激的启动离子角度分布）一起观察到了原子尺度上的表面现象。结果，我们通过PEEM（照片发射电子显微镜）和MEM（Mirror Electron显微镜）在半导体和金属表面的反应过程中成功地可视化实时表面现象，并在原子尺度上观察了广告的行为。我们揭示了其表面的相互作用和甲醇的分解过程。