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Development of Micro Strip Cas Chamber (MSGC) for the Use of Tow Dimentional X-ray Measurement

开发用于二维 X 射线测量的微带 Cas 室 (MSGC)

基本信息

批准号：
05555024
负责人：
HASEGAWA Takeo
金额：
$ 2.43万
依托单位：
Miyazaki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555024/
关键词：
Gas Micro Strip Proportional Chamber MSGC X-ray 2-dimentional Position Detector

项目摘要

Recently, so-called Micro Strip Gas Chamber has been constructed and used as the track detector in the high energy particle experiment, since this type of detector is capable of not only good position resolution but also high counting rate due to it's small sized geometrical structure using recent microelectronics technology. This type of detector is operated based on the gas proportional chamber and is considered to be applicable to measuring the X-rays with high detection efficiency.Therefore, we have developed the two-dimentinal type Micro Strip Gas Chamber (MSGC) for the use of detecting X-rays applied to the investigation of the material surface analysis in thisproject.Two-dimentional type of Micro Strip Gas Chamber of 4*4cm^2 dimention was constructed using micro technology of IC production. The back side insulated plate was made by quartz coated by silica nitride and implanted boron ions to adjust the surface registivity.The dector was tested for getting the charge signals not only from the surface anode strips but also the backside cathode strips using X-ray source and high energy particles at KEK Proton Synchrotron.At the beginning stage some discharge troubles happened in the thin back plates shorted, which was overcomed by adding treating process of coating once more and make it thicker also.Finally, we were succeeded to get the two-dimentional signals and confirmed the possibility of applicating to the X-ray dections, though the practical use for the X-ray analysis was not yet tried due to the discharge troubles.

近年来，人们利用微电子技术研制出了一种新型的微条形气室，它不仅具有良好的位置分辨能力，而且由于其几何尺寸小，计数率高，因而被用作高能粒子实验中的径迹探测器。这种探测器基于气体正比室工作，被认为适用于测量X射线，探测效率高，因此，我们研制了用于材料表面分析研究的X射线探测的二维型微带气室（MSGC），该二维型微带气室尺寸为4 × 4cm ~（-1）。利用集成电路生产中的微型技术构造了二维图形。用氮化硅涂层石英制作背面绝缘板，注入硼离子调节表面的寄存器，在KEK质子同步加速器上用X射线源和高能粒子对探测器进行了测试，不仅可以得到表面阳极条的电荷信号，而且可以得到背面阴极条的电荷信号，在开始阶段，薄背板发生短路，最后，我们成功地获得了二维信号，证实了应用于X射线检测的可能性，但由于放电问题，X射线分析的实际应用还没有尝试。