Development of Micro Strip Cas Chamber (MSGC) for the Use of Tow Dimentional X-ray Measurement

近年来，人们利用微电子技术建造了微带气体室，作为高能粒子实验中的径迹探测器，这种探测器不仅具有良好的位置分辨率，而且由于其小尺寸的几何结构，计数率也很高。这种探测器是基于气体正比室工作的，被认为适用于高探测效率的X射线测量。为此，我们研制了用于探测X射线的二维微带气室(MSGC)，并将其应用于本项目的材料表面分析研究。在KEK质子同步加速器上用氮化硅包覆的石英和离子注入的硼离子制成背面绝缘板，用X射线源和高能粒子获取表面阳极片和背面阴极片的电荷信号，并对探测器进行了测试。在开始阶段，短路的薄背板出现了一些放电故障，通过再次增加涂层处理工艺使其增厚，克服了这一问题。最后，成功地获得了二维信号，证实了应用于X射线检测的可能性。虽然X射线分析的实际应用还没有尝试，但由于放电问题。

Recently, so-called Micro Strip Gas Chamber has been constructed and used as the track detector in the high energy particle experiment, since this type of detector is capable of not only good position resolution but also high counting rate due to it's small sized geometrical structure using recent microelectronics technology. This type of detector is operated based on the gas proportional chamber and is considered to be applicable to measuring the X-rays with high detection efficiency.Therefore, we have developed the two-dimentinal type Micro Strip Gas Chamber (MSGC) for the use of detecting X-rays applied to the investigation of the material surface analysis in thisproject.Two-dimentional type of Micro Strip Gas Chamber of 4*4cm^2 dimention was constructed using micro technology of IC production. The back side insulated plate was made by quartz coated by silica nitride and implanted boron ions to adjust the surface registivity.The dector was tested for getting the charge signals not only from the surface anode strips but also the backside cathode strips using X-ray source and high energy particles at KEK Proton Synchrotron.At the beginning stage some discharge troubles happened in the thin back plates shorted, which was overcomed by adding treating process of coating once more and make it thicker also.Finally, we were succeeded to get the two-dimentional signals and confirmed the possibility of applicating to the X-ray dections, though the practical use for the X-ray analysis was not yet tried due to the discharge troubles.