Development of Micro Strip Cas Chamber (MSGC) for the Use of Tow Dimentional X-ray Measurement

由于采用最新的微电子技术，其几何结构尺寸小，不仅具有良好的位置分辨率，而且计数率高，因此，近年来，人们建造了所谓的微带气体室，并将其用作高能粒子实验中的轨迹探测器。这种探测器是在气体比例室的基础上工作的，被认为适用于测量x射线，具有很高的检测效率。因此，我们开发了二维型微带气室（MSGC），用于检测x射线，用于本项目中材料表面分析的调查。利用集成电路生产微技术，构建了尺寸为4*4cm^2的二维型微带气室。在石英表面涂覆氮化硅，并注入硼离子调节表面注册率，制成背面绝缘板。在KEK质子同步加速器上，利用x射线源和高能粒子，测试了该检测器不仅能从表面阳极带获得电荷信号，还能从背面阴极带获得电荷信号。在生产初期，短板薄后板出现了一些放电问题，通过再次添加涂层处理工艺，使其变厚，克服了这一问题。最后，我们成功地获得了二维信号，并证实了应用于x射线检测的可能性，尽管由于放电问题尚未尝试实际应用于x射线分析。

Recently, so-called Micro Strip Gas Chamber has been constructed and used as the track detector in the high energy particle experiment, since this type of detector is capable of not only good position resolution but also high counting rate due to it's small sized geometrical structure using recent microelectronics technology. This type of detector is operated based on the gas proportional chamber and is considered to be applicable to measuring the X-rays with high detection efficiency.Therefore, we have developed the two-dimentinal type Micro Strip Gas Chamber (MSGC) for the use of detecting X-rays applied to the investigation of the material surface analysis in thisproject.Two-dimentional type of Micro Strip Gas Chamber of 4*4cm^2 dimention was constructed using micro technology of IC production. The back side insulated plate was made by quartz coated by silica nitride and implanted boron ions to adjust the surface registivity.The dector was tested for getting the charge signals not only from the surface anode strips but also the backside cathode strips using X-ray source and high energy particles at KEK Proton Synchrotron.At the beginning stage some discharge troubles happened in the thin back plates shorted, which was overcomed by adding treating process of coating once more and make it thicker also.Finally, we were succeeded to get the two-dimentional signals and confirmed the possibility of applicating to the X-ray dections, though the practical use for the X-ray analysis was not yet tried due to the discharge troubles.