Development of quantitative analysis system for electron microscope images observed with imaging plates

开发成像板观察的电子显微镜图像定量分析系统

• 批准号: 05555165
• 负责人: SHINDO Daisuke
• 金额: $ 9.73万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555165/
• 关键词: Imaging Plate; Electron Microscope; Quantitative Analysis; Computer Network; Image Analysis

A quantitative image processing system for electron microscope images obtained with imaging plates has been developed by utilizing the network system (TAINS) and an engineering work station. Basic properties of the imaging plates, such as the resolution and fading phenomena were also investigated. Based on the properties and using the quantitative analysis system, detailed analysis of electron diffraction patterns and high-resolution images was carried out. In the analysis of electron diffraction patterns, detailed intensity distribution of diffuse scattering in compound semiconductors was clearly analyzed to make clear the ordered atomic arrangement of the constituent elements. On the other hand, in the analysis of high-resolution electron microscope images, a residual index was introduced. By minimizing the residual index, deficiency of the constituent elements in a high-Tc superconductor was quantitatively analyzed. Since the quantitative analysis system can be applied to the image analysis with conventional EM films, it will be very useful in quantification for both electron diffraction patterns and high-resolution electron microscope images.

利用网络系统和工程工作站，开发了一套电子显微镜成像板图像的定量图像处理系统。研究了成像板的基本性能，如分辨率和衰落现象。根据材料的性质，利用定量分析系统，对电子衍射图和高分辨率图像进行了详细的分析。在电子衍射图的分析中，清晰地分析了化合物半导体中扩散散射的详细强度分布，明确了组成元素的有序原子排列。另一方面，在高分辨率电子显微镜图像的分析中，引入了残差指数。通过最小化剩余指数，定量分析了高温超导体中组成元素的缺陷。由于定量分析系统可以应用于传统的电镜图像分析，它将在电子衍射图样和高分辨率电子显微镜图像的定量分析中非常有用。

项目成果

D.Shindo: "High-Resolution Electron Microscopy of Short-Range Ordered Structure of Ga_<0.5>In_<0.5>P" J.Electron Microsc.42. 227-230 (1993)

D.Shindo：“Ga_<0.5>In_<0.5>P 短程有序结构的高分辨率电子显微镜”J.Electron Microsc.42。

T.Oikawa: "Evaluation Method for Imaging Plate Resolution" ICEM13-PARIS. 221-222 (1994)

T.Oikawa：“成像板分辨率的评估方法”ICEM13-PARIS。

工藤節子: "超薄切片電子顕微鏡法の酸化アルミニウム-二酸化ケイ素球状介在物及び六角板状酸化鉄(III)微粒子への応用" 分析化学. 43. 563-567 (1994)

Settsuko Kudo：“超薄切片电子显微镜在氧化铝-二氧化硅球形包裹体和六方板状氧化铁(III) 颗粒中的应用”分析化学 43. 563-567 (1994)。

進藤大輔: "フィルムスキャナを用いた電子顕微鏡画像の解析" 東北大学大型計算機センター広報. 26. 106-113 (1993)

Daisuke Shindo：“使用胶片扫描仪分析电子显微镜图像”东北大学大型计算机中心公共关系 26. 106-113 (1993)。

T.Oikawa: "Fading Characteristic of Imaging Plate for a Transmission Electron Microsocpe" J.Electron Microsc.43. 402-405 (1994)

T.Oikawa：“透射电子显微镜成像板的衰落特性”J.Electron Microsc.43。