Design and Fabrication of Functional Inorganic Materials by Laser Ablation

在这项国际联合研究计划中，研究了激光烧蚀的机理及其在形成功能无机材料方面的应用。在第一年(1994财年)，用准分子激光和质谱学研究了烧蚀机理。研究表明，发射的原子和分子是通过多光子过程光化学形成的。建立了粒子能量对薄膜形成的影响。第二年(1995财年)研究了铁电和超导人工晶格的形成。结果表明，利用这种特殊的激光烧蚀方法可以构建具有较大介电常数的应变超晶格。用激光烧蚀技术还形成了可控制CuO_2面数的新超导体。

The mechanism of laser ablation and its application to the formation of functional inorganic materials have been studied in this international joint research program. In the first year (1994 fiscal year), the ablation mechanism was studied by using excimer laser and mas-spectroscopy. It has been revealed that the emitted atoms and molecules are formed photochemically through multi-photon processes. The effect of the energy of particles on the thin film formation was established. In the second year (1995 fiscal year), formation of ferroelectric and superconducting artificial lattices were studied. It has revealed that strained superlattice which shows large dielictric constant can be constructed by this particular laser ablation. New superconductors with the control of the number of CuO_2 plane have been also formed using the laser ablation technique.