The Establishment of C_<60> Plasma Production and Its Applications
The Establishment of C_<60> Plasma Production and Its Applications
批准号:
06402063
负责人:
SATO Noriyoshi
金额:
$21.12万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (A)
财政年份:
1994
资助国家:
日本
项目状态:
已结题
起止时间:
1994 至 1996
中文摘要
在<60>轴向强磁场作用下,将“巴克敏斯特富勒烯(Buckminsterfullerene,C)<60>“粒子引入低温(<similar or equal>0.2eV)钾等离子体柱中,产生了由电子、正K^+离子和大的负C ^-离子组成的超细粒子等离子体。当采用四面喷流的新型升华炉系统控制等离子体结构,实现K-富勒烯等离子体的高效制备时,观察到K^+和大部分C <60>^-在磁场线上广泛分布,而电子则受到很好的约束。随着C_<60>^-分数的增加,电子屏蔽减小,对等离子体集体现象产生明显的影响,这在离子声波传播和漂移型不稳定性中得到了证实。另外,还观察到大负离子C_ ^-的局部产生<60>导致了沿着磁力线的静电势的形成,而当粒子沉积基片浸没在主要由K^+和C_ ^-组成的等离子体<60>中时,偏压随局部等离子体电位的变化,<60>则成功地控制了所形成薄膜的K和C_^-组分。根据这种偏压对K^+和C_<60>^-离子与衬底接触的流量的控制,在K-C_2化合物的形成过程中观察到薄膜结构和质量(如表面粗糙度和电导率)的急剧变化<60>。衬底偏压还伴随着对进入的K^+和C ^-离子的能量控制<60>。由于这种离子选择性加速效应,离子半径大于富勒烯六元环半径的K^+被插入到C <60>^+笼中,在基底上形成空气稳定的内嵌金属富勒烯K@C<60>。
英文摘要
An ultrafine-particle plasma consisting of electrons, positive K^+ ions, and large negative C_<60>^- ions is produced by introducing "Buckminsterfullerene, C_<60>" particles into a low-temperature (<similar or equal>0.2eV) potassium plasma column confined by a strong axial magnetic field. When a new-type sublimation oven system with jets on four sides is used in order to control a plasma structure and achieve an efficient production of the K-fullerene plasma, K^+ and a large fraction of C_<60>^- are observed to broadly distribute across the magnetic-field lines in contrast with well-confined electrons. With an increase in the C_<60>^- fraction, the electron shielding decreases, yielding clear effects on plasma collective phenomena, which are demonstrated for ion-acoustic wave propagations and drift-type instabilities. It is also observed that a local production of large negative ions C_<60>^- results in the electrostatic potential formation along the magnetic-field lines.When biases of particle-deposition substrates immersed in the plasma consisting mainly of K^+ and C_<60>^- are varied with respect to local plasma potentials.on the other hand, K and C_<60> components of thin films formed are successfully controlled. In accordance with this bias control of fluxes of K^+ and C_<60>^- ions coming into contact with the substrate, drastic changes in thin-film structure and quality such as surface roughness and electrical conductivity are observed in the formation of K-C_<60> compounds. The substrate bias is also accompanied by energy control of the incoming K^+ and C_<60>^-ions. Due to this effect of selective acceleration of the ion species, K^+ with the ionic radius larger than a fullerene six-membered-ring radius is observed to be inserted into the C_<60>^+ cage, forming an air-stable endohedral metallofullerene K@C_<60> on the substrate.
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T.Hirata: "Analysis of ion species in Potassium-fullerene plasmas" J.Plasma Fusion Res.71. 615-619 (1995)
T.Hirata:“钾富勒烯等离子体中离子种类的分析”J.Plasma Fusion Res.71。
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通讯作者:
SATO,Noriyoshi: "Production of C_<60> plasma." Phys.Plasmas. Vol.1, No.10. 3480-3484 (1994)
SATO,Noriyoshi:“C_<60>等离子体的生产。”
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K.Ohno: "Ab initio molecular dynamics simulatrons for collision between C^-_<60> and Alkalli-Metalions:a possiblity of Li@C_<60>" Phys.Rev.Lett.76. 3590-3593 (1996)
K.Ohno:“C^-_<60> 和碱金属离子之间碰撞的从头算分子动力学模拟器:Li@C_<60> 的可能性”Phys.Rev.Lett.76。
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T.Hirata: "Analysis of ion species in K-fullerene plasmas" Proc.of 12th Sympo.on Plasma Processing. 99-102 (1995)
T.Hirata:“K-富勒烯等离子体中离子种类的分析”第 12 届等离子体处理研讨会论文集。
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HIRATA,Takamichi: "Production and Control of K-C_<60> Plasma for Material Processing." J.Vac.Sci.Technol.Vol.A14, No.2. 615-618 (1996)
HIRATA,Takamichi:“用于材料加工的 K-C_<60> 等离子体的生产和控制。”
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共 22 条
Development of modified magnetron-typed plasma source
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批准号:08558043
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项目类别:Grant-in-Aid for Scientific Research (A)
-
资助金额:$8.96万
-
财政年份:1996
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负责人:SATO Noriyoshi
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依托单位:
Large-diameter plasma sourcs for plasma processing
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批准号:08044118
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项目类别:Grant-in-Aid for international Scientific Research
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资助金额:$0.64万
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财政年份:1996
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负责人:SATO Noriyoshi
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依托单位:
Production of large-diameter plasmas for plasma processing
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批准号:07044308
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项目类别:Grant-in-Aid for International Scientific Research.
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资助金额:$0.0万
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财政年份:1995
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负责人:SATO Noriyoshi
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依托单位:
Plasma Science
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批准号:07308036
-
项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$5.12万
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财政年份:1995
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负责人:SATO Noriyoshi
-
依托单位:
Plasma Production by New Type ECR Antenna for Large Area Uniform Processing
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批准号:05558053
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项目类别:Grant-in-Aid for Developmental Scientific Research (B)
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资助金额:$10.37万
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财政年份:1993
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负责人:SATO Noriyoshi
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依托单位:
Negative Ion Plasmas
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批准号:63460219
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.8万
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财政年份:1988
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负责人:SATO Noriyoshi
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依托单位:
Laboratory Experiments on Electrostatic Potential Structure concerned with Aurora Phenomenon
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批准号:61460226
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.29万
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财政年份:1986
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负责人:SATO Noriyoshi
-
依托单位:
Experimental Investigations on New Plasma Phenomena
-
批准号:60302088
-
项目类别:Grant-in-Aid for Co-operative Research (A)
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资助金额:$4.74万
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财政年份:1985
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负责人:SATO Noriyoshi
-
依托单位:
海外基金