Production of large-diameter plasmas for plasma processing

大直径均匀等离子体源的开发对于实现大面积等离子体处理至关重要。为了产生这样的均匀等离子体，东北大学开发了一种带有永久磁铁的平面缝隙天线，用于产生电子回旋共振（ECR）等离子体。该方法成功地提供了具有（]SY. ±.]）均匀性的大直径ECR等离子体。(3-5)%，直径为40-50 cm。此外，东北大学开发的改良磁控管型等离子体源也可以提供大直径均匀的射频（RF）等离子体。另一方面，韩国科学技术高等研究院（Kaist）利用螺旋波加热和感应耦合等离子体方法，在RF频率下研究了高密度等离子体源。本研究课题的主要目的是将东北大学和韩国科学技术院的研究成果联合收割机结合起来，开发用于广域等离子体加工的大直径均匀等离子体源。在项目期间，我们在KAIST举办了两次研讨会，讨论东北大学平面ECR天线等离子体源提供的自由基密度均匀性检测的问题和技术。实验表明了等离子体参数径向分布的重要性。

Development of large-diameter uniform plasma sources is of crucial importance for performing a wide-area plasma processing.In order to produce such a uniform plasma a plane-slotted antenna with permanent magnets has been developed to produce an electron cyclotron resonance (ECR) plasma at Tohoku University. This method successfully provides a large-diameter ECR plasma with a uniformity of (]SY.+-.])(3-5)% over a diameter of 40-50 cm. Moreover, a modified magnetron typed plasma source developed at Tohoku University also provides large-diameter uniform radio-frequency (RF) plasmas.On the other hand, high density plasma sources are studied at the Korean Advanced Institute of Science and Technology (Kaist) by using helicon wave heating and inductively coupled plasma production methods at the RF frequency. The diagnostic method employing optical probe has also been developed to evaluate the radical density and its profile in reactive plasmas.The main purpose of this project is to combine such results obtained at Tohoku University and the KAIST to develop a large-diameter uniform plasma source for the wide-area plasma processing. During the project we had two seminars at the KAIST to discuss about the problems and techniques for detecting the uniformity of radical density supplied from the plane ECR antenna plasma source at Tohoku University. The experiments show the importance of radial profile of plasma parameters.