Development of isotope microscope for proto-solar system survey

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A novel solid-state area detector for charged particles has been developed in this study. The detector called AMI is based on semiconduct or theory for Si substrate. Pixel electrodes for bombardment of ions and electrons with the energy from eV to keV were deposited on the semiconductor device A prote-type model of isotope microscope has also been developed. The isotope microscope is combination system of the AMI detector with stigmatic secondary ion mass spectrometer.The isotope microscope applied to the study of isotope imaging of solid sample. Spatial resolution of the image achieved to 1 mum. The image size is 512 (H) x 250 (V) pixels. Dynamic range of one pixel is four orders of magnitude. The imaging area is controlled by zooming system of the mass spectrometer. The zooming area is over the range of 25 to 400 mum. We are planning to get isotope ratio image of meteoritic materials. The isotope image may make clear the origin and evolution of the solar system and planets. The AMI detector and isotope microscope are also effective tool for material sciences and high energy physics.