Development of simultaneous in-situ measurements of size, density, and refractive index of particles in rf silane plasmas using a polarization-sensitive laser-light-scattering method

使用偏振敏感激光散射方法开发同步原位测量射频硅烷等离子体中颗粒的尺寸、密度和折射率

• 批准号: 06555023
• 负责人: SHIRATANI Masaharu
• 金额: $ 3.46万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555023/
• 关键词: laser-light-scattering; two demensional measurement; simultaneous; polarization; particles; plasma CVD; plasma process; silane plasma; レーザ偏光散乱法; ダスト; バ-ティクル; 屈折率; その場測定

A polarization-sensitive laser-light-scattering method is developed for simultaneous in-situ measurements of properties (size, size dispersion, density and refractive index), and two dimensional spatial distributions of size and density of particles formed in processing plasmas. The developed system is applied to observe the growth processes of particulates in a range of their size larger than about 10 nm in rf silane plasmas. A size, a size dispersion (logarithm of a standard deviation of size), a density, and a refractive index of particulates in the plasmas are found to be 10-200 nm, about 0.1,10^7-10^9cm^<-3> and about 3-5i, respectively. The developed two demensional system can view the whole discharge area of 50*200mm^3 illuminated by a sheet laser beam with a spatial resolution of 2*2*2mm^3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and higher than 10^6cm^<-3> in density. The former such values agree fairly well with ones deduced from scanning electron microscopic (SEM) observation. These particles grow through three phases of nucleation and initial growth, rapid growth and growth saturation. Co-existence of two size-groups of particulates with narrow size dispersions during and after the rapid growth phase verified by the SEM observation may be explained by a model taking into account coagulation between oppositely charged particulates.

建立了一种偏振敏感的激光散射方法，用于同时原位测量加工等离子体中形成的粒子的性质（尺寸，尺寸色散，密度和折射率）以及尺寸和密度的二维空间分布。该系统可用于观察射频硅烷等离子体中粒径大于10nm的颗粒的生长过程。等离子体中粒子的尺寸、尺寸色散（尺寸标准差的对数）、密度和折射率分别为10- 200nm，约0.1,10^7-10^9cm^<-3>和约3-5i。所开发的二维系统可以观测到50*200mm^3的整个放电区域，空间分辨率为2*2*2mm^3，时间分辨率为33 ms，测量尺寸大于50 nm，密度大于10^6cm^<-3>的颗粒。前者的这些值与扫描电子显微镜（SEM）观测所得的值相当吻合。这些颗粒的生长经历了成核和初始生长、快速生长和生长饱和三个阶段。在扫描电镜观察证实的快速生长阶段和之后，两个粒径分布较窄的颗粒群共存，可以用考虑相反带电颗粒之间凝聚的模型来解释。

项目成果

M.Shiratani et al.: "In-situ polarization-senstive lazer light-scattering method for simultanious measurements of two-demensional spatial size and density distributions of particles in plasmas" J.Vac.Sci.& Technol.A.14(印刷中). (1996)

M. Shiratani 等人：“用于同时测量等离子体中粒子的二维空间尺寸和密度分布的原位偏振敏感激光光散射方法”J.Vac.Sci.& Technol.A.14（打印） ）（1996）

岩垣 暢浩: "プロセスプラズマ中微粒子のサイズと密度の2次元空間分布その場同時測定の開発" 電気関係学会九州支部連合大会論文集. 47. 123-123 (1994)

Nobuhiro Iwagaki：“工艺等离子体中细颗粒尺寸和密度的二维空间分布的同步原位测量的开发”日本电气工程师九州分会会议记录47。123-123（1994）。

Masaharu Shiratani: "In-situ polarization-senstive laser-light scattering method for simultanious measurements of two dimensional spatial size and density distributions of particles in plasmas" Journal of Vacuum Science & Technology A. (印刷中). (1996)

Masaharu Shiratani：“用于同时测量等离子体中粒子的二维空间尺寸和密度分布的原位偏振敏感激光散射方法”真空科学与技术杂志 A.（出版中）。

M.Shiratani et al.: "Two demensional spatial profiles of size and density of particulates grown in RF silane plasmas" IEEE Trans.Plasma Sci.24(印刷中). (1996)

M. Shiratani 等人：“RF 硅烷等离子体中生长的颗粒的尺寸和密度的二维空间剖面”IEEE Trans.Plasma Sci.24（出版中）。

Masaharu Shiratani: "Two dimensional spatial profiles of size and density of particulates grown in rf silane plasmas" IEEE Transactions on Plasma Science. (印刷中). (1996)

Masaharu Shiratani：“射频硅烷等离子体中颗粒尺寸和密度的二维空间分布”，IEEE 等离子体科学汇刊（1996 年出版）。