Frontier science and technology of nanoblock transport and arrangement

在这个项目中，我们研究了纳米颗粒的传输、排列和沉积。我们得到了以下结果：(1)基片上的局域势结构使我们可以在基片上排列纳米颗粒。(2)新开发的二维原位激光散射方法有助于以二维的方式评价纳米颗粒的初始生长相。(3)纳米颗粒复合薄膜具有超低的k和高的杨氏髓质。(4)调幅脉冲放电有效地实现了对精细结构的沉积轮廓控制。

In this project, we have studied transport, arrangement and deposition of nanoparticles. We have obtained following results.(1) Localized potential structure on substrates allows us to arrange nanoparticles on the substrates.(2) Novel developed 2-dementional in-situ laser light scattering method is useful for evaluating the initial growth phase of nanoparticles in 2-d ways.(3) Nanoparticle-composit films show ultra low-k and high Young's medullas.(4) Amplitude modulated pulse discharges are effective for realizing deposition profile control on fine structures.