Development of Simultaneous 3-axis control ultraprecision machine tool based on principle of Walking Drive

基于步进驱动原理，研制了一种三轴联动超精密XYhita工作台，并对其基本特性进行了研究。主要研究成果如下：1.高刚度超精密XY工作台的研制基于研究人员提出的步行驱动原理，新研制了三轴控制XY工作台。该装置由平板工作台和三套驱动单元组成，每套驱动单元配备两对驱动块。一个驱动块有三个压电(PZT)致动器，用于在两个方向上夹持和进给工作台，从而通过同时控制执行器的运动，使工作台可以在X、Y和Rheta方向上驱动。由于工作台直接由PZT驱动器支撑，因此在X、Y两个方向上都具有25kgf/um的高刚度。虽然PZT驱动器本身的行程为3.5um/35V，但工作台可以分别在X、Y和Rheta方向上驱动正负50 mm、正负20 mm和&lt；正负10ﾟ的行程2。XY-TUTRA工作台实时运动控制器的研制为了控制PZT驱动器的复杂运动，研制了一种实时运动控制器。控制器的设计使得X、Y和Rheta AXS进给速度的运动指令被自动处理，以控制PZT驱动器的运动。采用重复学习控制方案，实现了纳米量级的高运动精度。研制了一种超精密车床，该机床主要由一台超精密气轴和所研制的XY-HUTRA工作台组成。对无氧铜的镜面进行了金刚石车削试验。

A simultaneous 3-axis control ultraprecision XYrheta table has been developed based on the principle of Walking Drive, and its fundamental characteristics are investigated. The major research results are summarized as follows ;1. Development of high stiffness ultraprecision XYrheta tableThree-axis control XYrheta table was newly developed, which is based on the principal of Walking Drive proposed by the investigators. The device consists of a flat plate table and three sets of driving units, each of which is equipped with two pairs of driving blocks. One driving block has three piezoelectric (PZT) actuators to clamp and feed the table in two directions so that the table can be driven in X,Y and rheta directions by simultaneously controlling the motion of the actuators. Since the table is supported by PZT actuator directly, it has high stiffness of 25kgf/um in both X and Y directions. Although the stroke of the PZT actuator itself is 3.5 mum/35V, the table can be driven for the storkes of <plus-minus>50mm, <plus-minus>20mm and <plus-minus>10ﾟ in X,Y and rheta directions respect2. Development of realtime motion controller for XYrheta tableA realtime motion controleer was developed to control complicated motion of PZT actuators. The controller is so designed that the motion command of feed rates of X,Y and rheta axs is automatically processed to control the motion of PZT actuators. High motion accurcy of nm order was achived by applying the repetitive learning control scheme.3. Development of ultraprecision turning machine with XYrheta controlAn ultraprecision turning machine was developed, which basically consists of an ultraprecision air spindle and the XYrheta table developed. Some diamond turning tests were carried out to finish the mirror surfaces of oxygeon free copper.