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Development of Simultaneous 3-axis control ultraprecision machine tool based on principle of Walking Drive

基于行走驱动原理的三轴联动控制超精密机床的研制

基本信息

批准号：
06555039
负责人：
MORIWAKI T
金额：
$ 8万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555039/
关键词：
Walking drive Ultraprecision machine tool Piezoelectric actuator Precision feed device Ultraprecision positioning Nano technology Motion acuracy

项目摘要

A simultaneous 3-axis control ultraprecision XYrheta table has been developed based on the principle of Walking Drive, and its fundamental characteristics are investigated. The major research results are summarized as follows ;1. Development of high stiffness ultraprecision XYrheta tableThree-axis control XYrheta table was newly developed, which is based on the principal of Walking Drive proposed by the investigators. The device consists of a flat plate table and three sets of driving units, each of which is equipped with two pairs of driving blocks. One driving block has three piezoelectric (PZT) actuators to clamp and feed the table in two directions so that the table can be driven in X,Y and rheta directions by simultaneously controlling the motion of the actuators. Since the table is supported by PZT actuator directly, it has high stiffness of 25kgf/um in both X and Y directions. Although the stroke of the PZT actuator itself is 3.5 mum/35V, the table can be driven for the storkes of <plus-minus>50mm, <plus-minus>20mm and <plus-minus>10ﾟ in X,Y and rheta directions respect2. Development of realtime motion controller for XYrheta tableA realtime motion controleer was developed to control complicated motion of PZT actuators. The controller is so designed that the motion command of feed rates of X,Y and rheta axs is automatically processed to control the motion of PZT actuators. High motion accurcy of nm order was achived by applying the repetitive learning control scheme.3. Development of ultraprecision turning machine with XYrheta controlAn ultraprecision turning machine was developed, which basically consists of an ultraprecision air spindle and the XYrheta table developed. Some diamond turning tests were carried out to finish the mirror surfaces of oxygeon free copper.

基于行走传动原理，研制了一种三轴同步控制的超精密木工工作台，并对其基本特性进行了研究。主要研究成果总结如下：1。基于研究者提出的行走驱动原理，研制了一种新型的三轴控制木结构工作台。该装置由一个平板工作台和三组驱动单元组成，每组驱动单元配有两对驱动块。一个驱动块有三个压电（PZT）致动器，分别在两个方向夹持和进给工作台，通过同时控制致动器的运动，实现工作台在X、Y和rhea方向上的驱动。由于工作台由PZT作动器直接支撑，因此在X和Y方向上都具有25kgf/um的高刚度。虽然PZT执行器本身的行程为3.5 mum/35V，但工作台可以在X，Y和rheta方向上分别驱动<正负bbb50 mm， <正负>20mm和<正负>10。为控制压电陶瓷作动器的复杂运动，研制了一种实时运动控制器。该控制器通过自动处理X轴、Y轴和变轴进给速率的运动指令来控制压电陶瓷作动器的运动。采用重复学习控制方案，实现了nm级的高精度运动。研制了一种超精密车削机床，该机床主要由超精密空气主轴和XYrheta工作台组成。对无氧铜镜面进行了金刚石车削加工试验。