Study on Compensation Control of Thermal deformation of Ultraprecision Machine Tool

经过两年的研究，本研究的目标已经成功实现。主要研究成果如下：对超精密机床空气主轴系统的热特性进行了实验分析。考虑了主轴旋转产生的热量和环境空气温度变化的影响。据发现，由于环境温度变化的热变形随着转速的增加而增加，这被认为是由心脏转移的增加引起的。分别得到了主轴转速与热变形、环境温度与热变形之间的传递函数。提出了一种利用实测传递函数和卷积积分来估算和补偿热变形的简单方法，成功地将上述两种热源引起的加工误差降低到15%以下。

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;Thermal behavior of the main air spindle system of an ultraprecision machine tool is analyzed experimentally. Influences of the heat generated due to the spindle rotation and the temperature variation of the ambient air are considered. It is found that the thermal deformation due to the ambient temperature change increases with an increase in the rotational speed, which is considered to be caused by an increase in the heart transfer. The transfer functions between the rotational speed of spindle and the thermal deformation and between the ambient temperature and the thermal deformation are obtained separately. A simple method to estimate and compensate the thermal deformation is proposed by utilizing the measured transfer functions and the convolution integral, and machining errors due to the above two heat sources are successfully reduced to less than 15%.