Study on Compensation Control of Thermal deformation of Ultraprecision Machine Tool

超精密机床热变形补偿控制研究

• 批准号: 10450060
• 负责人: MORIWAKI Toshimichi
• 金额: $ 6.14万
• 依托单位: Kobe University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10450060/
• 关键词: Thermal Deformation; Ultraprecision Machine Tool; Air Spindle; Transfer Function; Convolution Integral; Compensation; Ambient Temperature; Rotational Speed; 超精密工作機; 周囲気温; ダイヤモンド切削加工; インプロセス補正制御; 誤差推定

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;Thermal behavior of the main air spindle system of an ultraprecision machine tool is analyzed experimentally. Influences of the heat generated due to the spindle rotation and the temperature variation of the ambient air are considered. It is found that the thermal deformation due to the ambient temperature change increases with an increase in the rotational speed, which is considered to be caused by an increase in the heart transfer. The transfer functions between the rotational speed of spindle and the thermal deformation and between the ambient temperature and the thermal deformation are obtained separately. A simple method to estimate and compensate the thermal deformation is proposed by utilizing the measured transfer functions and the convolution integral, and machining errors due to the above two heat sources are successfully reduced to less than 15%.

经过两年的研究，这项研究的目标已经成功地达到了。主要研究成果如下：对某超精密机床主气主轴系统的热行为进行了实验分析。考虑了主轴旋转产生的热量和周围空气温度变化的影响。发现由于环境温度变化引起的热变形随着转速的增加而增加，认为这是由于心脏传递增加引起的。分别得到了主轴转速与热变形之间、环境温度与热变形之间的传递函数。利用测量的传递函数和卷积积分，提出了一种简单的热变形估计和补偿方法，成功地将上述两种热源引起的加工误差减小到15%以下。

项目成果

Toshimichi Moriwaki: "Intelligent Tool Condition Monitoring for Milling"Manufacturing Systems. Vol. 27. 327-332 (1998)

Toshimichi Moriwaki：“铣削智能刀具状态监测”制造系统。

Toshimichi Moriwaki and Eiji Shamoto: "Intelligent Tool Condition Monitoring for Milling"Manufacturing Systems. Vol.27, No.3. 327-332 (1998)

Toshimichi Moriwaki 和 Eiji Shamoto：“铣削智能刀具状态监测”制造系统。

社本英二: "楕円振動切削加工法(第3報)-三次元切削への適用と実用的諸効果の検討-"精密工学会誌. Vol.65. 586-591 (1999)

Eiji Shamoto：“椭圆振动切削方法（第三次报告）-三维切削的应用和实际效果的研究-”日本精密工程学会杂志第65卷。586-591（1999）。

Eiji Shamoto and Toshimichi Moriwaki: "Ultraprecision Diamond Cutting of Hardened Steel by Applying Elliptical Vibration Cutting"Annals of the CIRP. Vol.48/1. 441-444 (1999)

Eiji Shamoto 和 Toshimichi Moriwaki：“采用椭圆振动切割对淬火钢进行超精密金刚石切割”CIRP 年鉴。

Eiji Shamoto, Hirotsugu Sugawara, Akio Tsuji and Toshimichi Moriwaki: "Ultraprecision Elliptical Vibration Cuttingof Steel"Reprint of JSME Conf. [No.99/2]. 179-180 (1999)

Eiji Shamoto、Hirotsugu Sukawara、Akio Tsuji 和 Toshimichi Moriwaki：“钢的超精密椭圆振动切割”JSME Con​​f. 重印。