Study on Compensation Control of Thermal deformation of Ultraprecision Machine Tool

点击翻译按钮获取中文摘要

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;Thermal behavior of the main air spindle system of an ultraprecision machine tool is analyzed experimentally. Influences of the heat generated due to the spindle rotation and the temperature variation of the ambient air are considered. It is found that the thermal deformation due to the ambient temperature change increases with an increase in the rotational speed, which is considered to be caused by an increase in the heart transfer. The transfer functions between the rotational speed of spindle and the thermal deformation and between the ambient temperature and the thermal deformation are obtained separately. A simple method to estimate and compensate the thermal deformation is proposed by utilizing the measured transfer functions and the convolution integral, and machining errors due to the above two heat sources are successfully reduced to less than 15%.