Fabrication of Integrated Air Valve Chip Using Shape Memory Ally Thin Film

使用形状记忆合金薄膜制造集成气阀芯片

• 批准号: 06555072
• 负责人: KURIBAYASHI Katsutoshi
• 金额: $ 4.61万
• 依托单位: Yamaguchi University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555072/
• 关键词: Micro valve; TiNi alloy; Si substrate; Shape memory alloy; Micromachine; Thin film; バルブモデル; TiNi形状記憶合金; FEM; RIE; 感光性ガラス

Micro valves were fabricated using shape memory alloy (TiNi) Thin Film actuator, focusing on the merits of the TiNi actuator, that is, 1) the actuator can be controlled easily by low voltage electrical current, 2) it generates big force, and 3) the thiner film of TiNi, the faster response.Two types of the micro valves were fabricated using Si wafer and photo machinable glass as the main structure of the valves.The micro valve of Si wafer was fabricated by depositing TiNi thin film on Si wafer and etching it by RIE (reactive ion etching) to make the valve profile.The micro valve of photo machinable glass was fabricated by heat and press assembling three pieaces of photo machinable glasses which are micromachined precisely by photo etching method. The characteristics of this type of valve, between the displacement of diaphram, the pressure of air and the temperature of TiNi thin film, were measured for fundamental design datas of the micro valve.

利用形状记忆合金（TiNi）薄膜作动器制作了微阀，重点分析了TiNi薄膜作动器的优点：1）易于用低压电流控制; 2）产生的力大; 3）TiNi薄膜较薄，以硅片和可光加工玻璃为主要结构，分别制作了两种微阀，微阀在Si片上沉积TiNi薄膜，用反应离子刻蚀（RIE）方法刻蚀出Si片上的阀型面，然后将三片光刻玻璃进行光刻精密加工，再通过热压组装的方法制备出光可加工玻璃微阀。测量了膜片位移、气压和TiNi薄膜温度之间的关系，为微阀的设计提供了基础数据。

项目成果

K.Kuribayashi: "A Study of Heat Process By Using Direct Electric Current Heating for Reversible SMA Thin Film Actuators" Proc.of Sixth International Symposium on Micro Machine and Human Science. 103-110 (1995)

K.Kuribayashi：“利用直接电流加热可逆 SMA 薄膜致动器的热过程研究”第六届国际微型机械与人类科学研讨会论文集。

Katsutoshi Kuribayashi: "Reversible Shape Memory Behaviors of TiNi Thin Films Processed by Direct Electric Current Heating" Proc.of the Seventh International Symposium on Micro Machine and Human Science. 131-136 (1996)

Katsutoshi Kuribayashi：“直接电流加热处理的TiNi薄膜的可逆形状记忆行为”第七届国际微型机械与人类科学研讨会论文集。

Katsutoshi Kuribayashi: "A Study of Heat Process by Using Direct Electric Current Heating for Reversible SMA Thin Film Actuators" Proc. of Sixth International Symposium on Micro Machine and Human Science. 103-110 (1995)

Katsutoshi Kuribayashi：“利用直接电流加热可逆 SMA 薄膜致动器的热处理研究”Proc。

栗林勝利: "形状記憶合金薄膜を用いたバルブの試作研究" 日本機械学会ロボティクス・メカトロニクス講演会'96講演論文集. Vol.B. 1227-1228 (1996)

Katsutoshi Kuribayashi：“使用形状记忆合金薄膜的阀门原型研究”日本机械工程师协会机器人和机电一体化会议 96 卷 1227-1228（1996 年）。

緒方 保之: "蛇管ワイヤを用いたマスタースレイブマイクロマニピュレータの試作と制御" 日本機械学会中国四国学生会第25回学生員 卒業研究発表講演会講演前刷集. 259-260 (1995)

Yasuyuki Ogata：“使用蛇形线的主从微操纵器的原型和控制”日本机械工程师学会中国-四国学生协会第25届学生毕业研究演示讲座的预印本259-260（1995）。