Fabrication of Integrated Air Valve Chip Using Shape Memory Ally Thin Film

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Micro valves were fabricated using shape memory alloy (TiNi) Thin Film actuator, focusing on the merits of the TiNi actuator, that is, 1) the actuator can be controlled easily by low voltage electrical current, 2) it generates big force, and 3) the thiner film of TiNi, the faster response.Two types of the micro valves were fabricated using Si wafer and photo machinable glass as the main structure of the valves.The micro valve of Si wafer was fabricated by depositing TiNi thin film on Si wafer and etching it by RIE (reactive ion etching) to make the valve profile.The micro valve of photo machinable glass was fabricated by heat and press assembling three pieaces of photo machinable glasses which are micromachined precisely by photo etching method. The characteristics of this type of valve, between the displacement of diaphram, the pressure of air and the temperature of TiNi thin film, were measured for fundamental design datas of the micro valve.