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Development of a contact type soft X-ray microscope with variable wavelength

开发接触式可变波长软X射线显微镜

基本信息

批准号：
06559002
负责人：
HIRANO Katsumi
金额：
$ 10.94万
依托单位：
Gunma University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06559002/
关键词：
Soft X-ray microscope Soft X-ray source Impulsive soft X-rays Z-pinch discharge High current discharge Image processing

项目摘要

The purpose of this project is to develop a cotact type soft x-ray microscope for observing fine alive biological samples. The laser produced plasma and the synchrotron orbit radiation have been considered for sources in the soft x-ray microscope. In this project we employed a Z-pinch plasma facility as the soft X-ray source because of its easy handing, high efficiency of the X-ray production, variability of the wave length and low cost in construction.Main results are followings ;(1) A plasma focus facility in which a fast acting valve for additional high Z gas puffing was mounted was developed, and plasmas of various high ion stage such as hydrogen-, helium-and lithium-like of N,C,O,Ne, Ar or Al were produced. The plasma density and temperature were 10^<20>-10^<21>/cm^3 and several keV,respectively.(2) Diagnostic methods such as an imaging spectrometer, a pinhole camera which enabled to evaluate the soft x-ray intensity quantitatively, a new concept x-ray imaging system in framing and in streak mode were developed.(3) Using those diagnostic tools, characterization of the soft x-rays generated by the plasma focus facility was carried out. Reproducibility of the soft x-ray generation was also examined.(4) Characteristics of filters and photoresists for the soft x-rays were surveyed experimentally and theoretically.(5) Based on information obtained with the diagnostics, we constructed a soft x-ray microscope system and examined its performance.(6) The system was examined using a biological samples, a fine whisker grown on the dragonfly's wing and yeast. The transcribed pattern on the photoresist was observed with an atomic force microscope. The spatial resolution of the system is 0.2 mu m Ar K-lines (-4*) as an the x-ray source and PMMA as the photoresist were employed.

本计画旨在研制一种接触式软x光显微镜，以观察活体生物样品。激光等离子体和同步轨道辐射被认为是软X射线显微镜的光源。本课题采用Z箍缩等离子体装置作为软X射线源，它具有操作方便、X射线产生效率高、波长可变、造价低等优点，主要研究结果如下：（1）开发了一种等离子体聚焦装置，其中安装了用于附加高Z气体吹扫的快速作用阀，产生N、C、O、Ne、Ar或Al类氦和类锂。等离子体密度和温度分别为10^<20>-10 ^<21>/cm ^3和几keV。(2)诊断方法，如成像光谱仪，针孔相机，使软X射线强度定量评估，一个新概念的X射线成像系统的框架和条纹模式的开发。(3)利用这些诊断工具，对等离子体聚焦设施产生的软X射线进行了表征。还检查了软X射线产生的再现性。(4)从实验和理论上研究了软X射线滤光片和光刻胶的特性。(5)基于诊断获得的信息，我们构建了一个软X射线显微镜系统，并检查其性能。(6)该系统使用生物样品进行了检查，一个细晶须生长在蝴蝶的翅膀和酵母。用原子力显微镜观察光致抗蚀剂上的转录图案。该系统的空间分辨率为0.2 μ m，采用Ar K线（-4*）作为X射线源，PMMA作为光刻胶。