Adhesion force measurements in UHV chamber of surface analysis appararus

表面分析仪特高压室内粘附力测量

• 批准号: 07405033
• 负责人: ONZAWA Tadao
• 金额: $ 13.89万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07405033/
• 关键词: adhesion; atomic force microscope; ultra high vacuum; molecular dynamics; chemical bond; interface; electronic spectroscopy; surface analysis; AFM; AES

A manipulating system which is available in ultra high vacuum chamber of an Auger electron microscope is newly introduced to our adhesion force measurement system. It has a heating system and an additive tilt freedom. Because of them, the reconstruction of surface structure, the smoothing of the surface and the in-situ observation of the surface by secondary electron microscope during the adhesion force measurements.The gold and the silicon wafer are used as the contacting material. Results are compared with our theory which is deduced assuming the elastic continuum. The effects of the ion sputtering on the adhesion force are examined. The governing mechanism of the adhesional contact is discussed by using the theory and the experimental results.

将俄歇电子显微镜超高真空室中的操纵系统引入到粘附力测量系统中。它有一个加热系统和一个附加的倾斜自由。因此，在粘附力测量过程中，表面结构的重建、表面的光滑以及二次电子显微镜对表面的原位观察都是非常重要的。将计算结果与弹性连续体理论进行了比较。研究了离子溅射对粘附力的影响。结合理论和实验结果，讨论了粘着接触的控制机理。

项目成果

水野,高橋,恩澤: "金とシリコンの間に働く固体間凝着力の測定" 溶接学会論文集. 14・3. 523-526 (1996)

Mizuno、Takahashi、Onzawa：“金和硅之间的固-固附着力的测量”日本焊接学会论文集 14・3（1996 年）。

Kunio TAKAHASHI,and Tadao ONZAWA: "Effect of the stiffness of the measurement system on adhesion force curves in the elastic ontinuum limit" Journal of Adhesion Science and Technology. 10・1. 17-31 (1996)

Kunio TAKAHASHI 和 Tadao ONZAWA：“测量系统的刚度对弹性连续体极限中的粘附力曲线的影响”《粘附科学与技术》杂志 10・1（1996 年）。

水野,高橋,恩澤: "オージェ電子分光装置内に構築した計測システムによる固体間凝着力の支配機構の検討" 溶接学会論文集. 14・4. 629-632 (1996)

Mizuno、Takahashi、Onzawa：“使用俄歇电子能谱仪内置的测量系统研究固-固粘附力的控制机制”日本焊接学会论文集 14・4 (1996)。

Kunio TAKAHASH,Nancy A.BURNHAM,Hubert M.POLLOCK and Tadao ONZAWA: "Stiffness of measurement system and significant figures of displacement which are required to interpret adhesional force curves" IEICE Transactions on Electronics, vol.E80-C. No.2(Feb.). 2

Kunio TAKAHASH、Nancy A.BURNHAM、Hubert M.POLLOCK 和 Tadao ONZAWA：“解释粘附力曲线所需的测量系统的刚度和位移的有效数字”IEICE Transactions on Electronics，卷 E80-C。

Ryoji MIZUNO,Kunio TAKAHASHI and Tadao ONZAWA: "Measurement of Adhesion force between Gold and Silicon" Quarterly J.of the Japan Welding Society. vol.14, No.3. 523-526 (1996)

Ryoji MIZUNO、Kunio TAKAHASHI 和 Tadao ONZAWA：“金和硅之间粘附力的测量”日本焊接学会季刊。