Electrostatic manipulation of a micro-object by controlling applied voltage

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This project had aimed at establishing a technique of electrostatic micro-manipulation with high reliability. For that purpose, an optimal voltage as a time-dependent function was theoretically derived ; the effectiveness was demonstrated through the experiment by electrostatic micro-manipulator. The voltage function was determined so that the kinetic energy of a micro-object could be controlled during the flight after detachment from a probe-tip and become zero at landing on a substrate. Additionally, since the energy absorbed due to the adhesional hysteresis exists at the contact of the micro-object to the substrate, an allowable error of voltage for the energy absorption was evaluated. In order to realize the derived voltage function, a power source with high voltage and high-speed response was designed. With this power source, a solder ball with the diameter of 30 um was successfully deposited on the substrate after detachment from the probe-tip in the experiment of electrostatic micro-manipulation. These results theoretically and experimentally proved that this method can be applied to IC packaging or micro-device assembly.