Electrostatic manipulation of a micro-object by controlling applied voltage

通过控制施加电压对微型物体进行静电操纵

• 批准号: 15360133
• 负责人: ONZAWA Tadao
• 金额: $ 3.07万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360133/
• 关键词: electrostatic force; adhesional force; micromanipulation; IC packaging; conductive micro-particle; Rapid voltage control; micro-object alignment; kinetic energy; 電圧; マニピュレーション; クーロン相互作用; 微小体; 実装; 条件決定

This project had aimed at establishing a technique of electrostatic micro-manipulation with high reliability. For that purpose, an optimal voltage as a time-dependent function was theoretically derived ; the effectiveness was demonstrated through the experiment by electrostatic micro-manipulator. The voltage function was determined so that the kinetic energy of a micro-object could be controlled during the flight after detachment from a probe-tip and become zero at landing on a substrate. Additionally, since the energy absorbed due to the adhesional hysteresis exists at the contact of the micro-object to the substrate, an allowable error of voltage for the energy absorption was evaluated. In order to realize the derived voltage function, a power source with high voltage and high-speed response was designed. With this power source, a solder ball with the diameter of 30 um was successfully deposited on the substrate after detachment from the probe-tip in the experiment of electrostatic micro-manipulation. These results theoretically and experimentally proved that this method can be applied to IC packaging or micro-device assembly.

本课题旨在建立一种高可靠性的静电微操作技术。为此，从理论上推导出最佳电压随时间变化的函数；通过静电微机械臂实验验证了该方法的有效性。确定了电压函数，使微物体在脱离探针尖端后的飞行过程中能够控制其动能，并在落在基板上时变为零。此外，由于粘滞所吸收的能量存在于微物体与衬底的接触处，因此对能量吸收的电压允许误差进行了评估。为了实现导出的电压函数，设计了一种高电压、高速响应的电源。利用该电源，在静电微操作实验中，成功地将直径为30 um的焊锡球从探针尖分离后沉积在衬底上。理论和实验结果表明，该方法可应用于集成电路封装或微器件组装。

项目成果

Kinetic control of a particle by voltage sequence for a nonimpact electrostatic micromanipulation

• DOI: 10.1063/1.1609039
• 发表时间: 2003-09
• 作者: S. Saito;Hideo Himeno;Kunio Takahashi;M. Urago

Non-impact Electrostatic Micromanipulation by Voltage Sequence for Time

通过电压序列进行时间的非冲击静电微操作

• 发表时间: 2004
• 期刊: Material Research Society Symposium Proceedings 782
• 作者: Ye Zhu;Jinhao Qiu;Hejun Du;Junji Tani;Shigeki Saito et al.
• 通讯作者: Shigeki Saito et al.