Improvement of energy selecting electron microscope with atom resolution and detection of different kinds of atoms in materials.

为了利用电子显微镜识别材料中的杂质原子及其团簇，利用在原子分辨电子显微镜下制作的能谱仪，选取受到内壳层激发的非弹性散射电子，重建成原子的像。由于具有内壳激发的电子的强度比初级电子的强度小100- 10，000倍，因此记录原子图像所需的曝光时间变为1分钟至1小时。如此长时间曝光的图像不可避免地会受到样本漂移的影响。为了补偿样品漂移，图像移动被拾取并反馈到具有压电元件的测角仪上的样品的移位。在原子分辨率水平上，样品的漂移在长曝光时间内是非线性的，而原先研制的无漂移测角仪系统在驱动机构上存在不足。因此，对系统进行了重新设计和重构。由于它是预期的，图像分辨率为0.2nm可以实现由348（]SY. ±-。[)3用Ca-L<@D22，3 @> D2能量损失电子记录了200 kV、高T<@D2c@>D2含Ca超导材料在40-120秒曝光下的能量损失电子。由于曝光时间不足以清晰地显示Ca原子的图像，采用图像处理技术对Ca原子的单、双、三重态进行了显示，得到了合理的Ca原子图像，并对能量损失约为100 kV时的非弹性散射势局域化进行了新的理论计算。并对钛合金的相变进行了观察。

In order to identify the foreign atoms and their clusters in the materials by using electron microscopes, the inelastically scattered electrons which have suffered from the inner shell excitation were selected by energy spectrometer fabricated under the atom resolution electron microscopes, and reconstructed to be the images of atoms. Since the intensity of electrons with inner shell excitation 100-10,000 times smaller than the one of primary electrons, the exposure time necessary for recording the atom images becomes to be one minute to one hour. The images with such long exposures inevitably suffer from the drift if the specimen. To compensate the specimen drift, image movement was picked up and feed back to the shift of the specimen on the goniometer with piezo electric element. All processes including detection of drift and driving the goniometer with an accuracy of 0.02nm were carried out using a computer of PC 9801.The drift of the specimen is not linear for a long exposure time at the atomic resolution level and the drift free goniometer system which was made at first was not sufficient in the driving mechanism. Thus the system was redesigned and reconstructed. Since it was expected, the image resolution of 0.2nm can be achieved by the 348(]SY.+-。[)3 eV energy loss electrons at 200kV,high T<@D2c@>D2 superconducting materials with Ca atoms were recorded using Ca-L<@D22,3@>D2 energy loss electrons with 40-120 sec exposures. Since the exposure time was not sufficient to reveal the images of Ca atoms clearly, some image processings have applied to reveal the single, double and triple Ca atom low and got reasonable Ca atom images.New theoretical calculation of the potential localization for inelastic scattering at about 100kV energy loss have been calculated. Observation on the phase transformation of Ti alloy were also carried out.