权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Improvement of energy selecting electron microscope with atom resolution and detection of different kinds of atoms in materials.

改进能量选择电子显微镜的原子分辨率并检测材料中的不同种类原子。

基本信息

批准号：
07455015
负责人：
HASHIMOTO Hatsujiro
金额：
$ 3.01万
依托单位：
OKAYAMA UNIVERSITY OF SCIENCE
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

In order to identify the foreign atoms and their clusters in the materials by using electron microscopes, the inelastically scattered electrons which have suffered from the inner shell excitation were selected by energy spectrometer fabricated under the atom resolution electron microscopes, and reconstructed to be the images of atoms. Since the intensity of electrons with inner shell excitation 100-10,000 times smaller than the one of primary electrons, the exposure time necessary for recording the atom images becomes to be one minute to one hour. The images with such long exposures inevitably suffer from the drift if the specimen. To compensate the specimen drift, image movement was picked up and feed back to the shift of the specimen on the goniometer with piezo electric element. All processes including detection of drift and driving the goniometer with an accuracy of 0.02nm were carried out using a computer of PC 9801.The drift of the specimen is not linear for a long exposure time at the atomic resolution level and the drift free goniometer system which was made at first was not sufficient in the driving mechanism. Thus the system was redesigned and reconstructed. Since it was expected, the image resolution of 0.2nm can be achieved by the 348(]SY.+-。[)3 eV energy loss electrons at 200kV,high T<@D2c@>D2 superconducting materials with Ca atoms were recorded using Ca-L<@D22,3@>D2 energy loss electrons with 40-120 sec exposures. Since the exposure time was not sufficient to reveal the images of Ca atoms clearly, some image processings have applied to reveal the single, double and triple Ca atom low and got reasonable Ca atom images.New theoretical calculation of the potential localization for inelastic scattering at about 100kV energy loss have been calculated. Observation on the phase transformation of Ti alloy were also carried out.

为了利用电子显微镜识别材料中的外来原子及其团簇，在原子分辨电子显微镜下制作的能谱仪选择了受到内壳层激发的非弹性散射电子，并将其重建为原子的图像。由于内壳层激发的电子强度比初级电子的强度小100-1万倍，因此记录原子图像所需的曝光时间为1分钟至1小时。长时间曝光的图像不可避免地会受到标本漂移的影响。为了补偿试件的漂移，利用压电式元件拾取像移并反馈给测角器上试件的位移。所有过程包括漂移的检测和驱动精度为0.02 nm的测角仪都是在PC9801计算机上完成的。样品在原子分辨率水平上长时间的漂移不是线性的，最初制作的无漂移测角仪系统在驱动机构上是不够的。因此，对系统进行了重新设计和重建。由于这是预期的，348(]sy.+-)可以达到0.2 nm的图像分辨率。[)用40-120秒曝光的Ca-L@D22，3@&gt；D2能量损失电子记录了200KV、高T&lt；@D2C@&gt；D2含钙超导材料的3 eV能量损失电子。由于曝光时间不足以清晰地显示出Ca原子的图像，我们采用了一些图像处理方法来显示低的单、双和三个Ca原子，得到了合理的Ca原子图像。对能量损失约为100KV的非弹性散射的势局域化进行了理论计算。并对钛合金的相变进行了观察。