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Fundamental Study on a High Brightness and High Resolution YAG Screen for Electron Microscopy

Fundamental Study on a High Brightness and High Resolution YAG Screen for Electron Microscopy
电子显微镜用高亮度高分辨率YAG屏幕的基础研究
批准号:
07455036
负责人:
HIBINO Michio
金额:
$4.22万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1995
资助国家:
日本
项目状态:
已结题
起止时间:
1995 至 1996

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中文摘要
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英文摘要
Coupled by a lens optical system with a photo-cathode, a single crystal of YAG (Yttrium Aluminum Garnet) has been used for a scintillator, which exchanges electron images to light images, in a new TV system for an electron microscopy. Lens coupled YAG scintillator system has advantages for damages due to the high energy electron irradiation and for lowering contrast by the x-ray. It was difficult, however, to achieve both high brightness and high resolution with this system, because the high refractive index of YAG reflects most of the light emitted in the crystal at the YAG-vacuum interface. In order to over come this problem of total reflection, we have developed a new scintillator combined a platelet YAG crystal with a glass hemisphere and have designed newly lens optical system.[In the first year] ;1. New type YAG scientillators have been developed, a hemisphere YAG crystal for a 100 kV electron microscope and a combination of platelet YAG and a glass hemisphere for a 1000 kV electron microscope.2. A lens coupling optical system for the 1000 kV electron microscope has been designed.[In the second year] ;1 Combining the new YAG scintillator and the lens optical system with a SIT-type TV-tube, we have produced a new TV system for the high voltage electron microscope, and2. We evaluated its characteristics with a light source and the 1000 kV electron microscope as,(1) Resolution The resolution is 50-60 mum on YAG for 1000 kV electrons.The curvature of a image plane due to the hemisphere can be reduced with a proper focusing condition(2) Brightness The glass hemisphere improves the brightness by a factor of 3.(3) Distortion The distortion due to the hemisphere is -4% at the edge of the TV screen.(4) Diminishing in the surrounding area dose not affect more than 70% in the monitor, and it is improbable.(5) DQE 0.04-0.12Consequently, we demonstrated that the TV-system for HVEM which is resistant to an electron irradiation damage and the effect of x-ray is available.
期刊论文(31)
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会议论文
R. A. Herring: "Interferometry Using Convergent Electron Diffracted Beams Plus an Electron Biprism (CBED+EBI)." Ultramicroscopy. 60・1. 153-169 (19954)
R. A. Herring:“使用会聚电子衍射束加电子双棱镜的干涉测量 (CBED+EBI)。” 超显微术 60・1 (19954)。
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S.Tanaka: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layr Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. Vol.166. 334-338 (1996)
S.Tanaka:“液相外延生长的 InGaAsP/InGaP 薄层结构的透射电子显微镜研究”晶体生长杂志。
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日比野倫夫: "High Resolution and High Collection Efficiency YAG Screen for Lens Coupling TV and CCD Camera" Proc.Sixth Asia-Pacific Conference on Electron Microscopy(eds.D.Barber et al.). 1. 45-46 (1996)
Michio Hibino:“用于镜头耦合电视和 CCD 相机的高分辨率和高收集效率 YAG 屏幕”Proc.第六届亚太电子显微镜会议(eds.D.Barber 等人)(1996 年)。
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27
    Observation of high resolution elemental mapping images using a high sensitivity detector
    • 批准号:
      04452103
    • 项目类别:
      Grant-in-Aid for General Scientific Research (B)
    • 资助金额:
      $4.03万
    • 财政年份:
      1992
    • 负责人:
      HIBINO Michio
    • 依托单位:
    On line digital manipulation process of elastically and inelastically scattered electron signals in scanning transmission electron microscopy
    • 批准号:
      63850078
    • 项目类别:
      Grant-in-Aid for Developmental Scientific Research
    • 资助金额:
      $5.5万
    • 财政年份:
      1988
    • 负责人:
      HIBINO Michio
    • 依托单位:
    Research on High Resolution Electron Microscope Observations without Specimen Damage
    • 批准号:
      62420021
    • 项目类别:
      Grant-in-Aid for General Scientific Research (A)
    • 资助金额:
      $12.35万
    • 财政年份:
      1987
    • 负责人:
      HIBINO Michio
    • 依托单位:
    Developemtn of High Resolution Scanning Transmission Electron Microscope through Spherical Aberration Correction by Means of a Foil Lens
    • 批准号:
      61850069
    • 项目类别:
      Grant-in-Aid for Developmental Scientific Research
    • 资助金额:
      $3.39万
    • 财政年份:
      1986
    • 负责人:
      HIBINO Michio
    • 依托单位:
    海外基金