Research on High Resolution Electron Microscope Observations without Specimen Damage
不损伤标本的高分辨率电镜观察研究
基本信息
- 批准号:62420021
- 负责人:
- 金额:$ 12.35万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for General Scientific Research (A)
- 财政年份:1987
- 资助国家:日本
- 起止时间:1987 至 1989
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
1. Field emission electron gun for high voltage scanning transmission electron microscope A field emission electron gun was mounted on the 10OOkV scanning transmission electron microscope (STEIM), after improving a vacuum system and establishing a monitor-control system for monitoring and controlling the operating condition of the gun. A stable field emission of more than 50muA was obtained with a <310> orientation tungsten tip.2. Detection of various signal electrons A new YAG single crystal scintillator was developed for high-sensitivity electron detector which gives the sensitivity of 10 times as much as a conventional powdered-phosphor scintillator. A method was established as well for detecting inelastically scattered and unscattered electrons with high accuracy, by improving an electron energy analyzing system.3. Signal manipulation A theoretical investigation for better image quality of specimen structure revealed an appropriate manipulation among elastically scattered, inelasti … More cally scattered and unscattered electrons. A signal manipulation system was established by developing an interface for effective data acquisition and a system for manipulating among various electron signals. Signal manipulation was then applied to practical electron microscope observations, which verified the effectiveness of signal manipulation for noise elimination, contrast enhancement of specific specimen structure, identification of constituting elements and so on.4. Influence of current density of illumination electrons on the specimen damage and high resolution observations without damage Studies on intensity change of electron diffraction pattern of hexatriacontane indicated that STEM illumination with a fine electron probe of high current density gives less specimen damage than long-time illumination of conventional electron microscopy with low current density. It was found as well that high resolution STEM observations without specimen damage are possible for fine platinum particles in a carbon film which are easily subject to damage of migration, adhesion and crystallization in conventional electron microscopy mode observations. Less
1.高压扫描透射电子显微镜用场发射电子枪在改进真空系统和建立监控系统后,将场发射电子枪安装在1000kV扫描透射电子显微镜(STEIM)上。采用取向钨针尖获得了大于50 μ A的稳定场发射<310>.研制了一种新型YAG单晶闪烁体作为高灵敏度电子探测器,其灵敏度是传统荧光粉闪烁体的10倍。通过对电子能量分析系统的改进,建立了一种高精度的非弹性散射和非散射电子的检测方法.信号处理为获得更好的试样结构图像质量,理论研究揭示了在弹性散射、非弹性散射和非弹性散射之间的适当处理。 ...更多信息 散射和未散射的电子。通过开发有效数据采集的接口和各种电子信号之间的处理系统,建立了信号处理系统。将信号处理应用于实际电镜观察,验证了信号处理在消除噪声、增强特定样品结构对比度、识别组成元素等方面的有效性.照射电子的电流密度对样品损伤和无损伤高分辨观察的影响对十六碳烷电子衍射图强度变化的研究表明,用高电流密度的细电子探针照射STEM比用低电流密度的常规电子显微镜长时间照射样品损伤小。它被发现,以及,高分辨率的STEM观察没有试样损坏是可能的碳膜中的铂微粒,很容易受到损害的迁移,粘附和结晶在传统的电子显微镜模式观察。少
项目成果
期刊论文数量(61)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
下山宏: "磁界重畳型電界放出電子銃の電子光学的特性の理論的解析" 豊田研究報告. 41. 57-64 (1988)
Hiroshi Shimoyama:“磁场叠加型场发射电子枪的电子光学特性的理论分析”丰田研究报告 41. 57-64 (1988)。
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- 影响因子:0
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飯吉僚: "Point Cathode Electron Gun Using Electron Beam Heating:Numerical Analysis of Bombarding Electron Beam for Cathode Tip Heating" Electron Microscopy 1988. 69-70 (1988)
Ryo Iiyoshi:“使用电子束加热的点阴极电子枪:用于阴极尖端加热的轰击电子束的数值分析”电子显微镜 1988. 69-70 (1988)
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児玉哲児: "A Novel Technique for Voltage Measurements of Passivation Layer in SEM" Journal of Electron Microscopy. 38. 6-15 (1989)
Tetsuji Kodama:“SEM 中钝化层电压测量的新技术”《电子显微镜杂志》38. 6-15 (1989)。
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- 影响因子:0
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杉山範雄: "A Line Cathode Electron Gun of Pierce-Type Design" Japanese Journal Applied Physics. 28. 267-273 (1989)
Norio Sugiyama:“皮尔斯型设计的线阴极电子枪”日本应用物理学杂志 28. 267-273 (1989)
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- 影响因子:0
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Susumu Maruse: "Construction of a high voltage scanning transmission electron microscope" Hawaii Seminar on Electron Microscopy. 15-16 (1987)
Susumu Maruse:“高压扫描透射电子显微镜的构造”夏威夷电子显微镜研讨会。
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HIBINO Michio其他文献
HIBINO Michio的其他文献
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{{ truncateString('HIBINO Michio', 18)}}的其他基金
Fundamental Study on a High Brightness and High Resolution YAG Screen for Electron Microscopy
电子显微镜用高亮度高分辨率YAG屏幕的基础研究
- 批准号:
07455036 - 财政年份:1995
- 资助金额:
$ 12.35万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Observation of high resolution elemental mapping images using a high sensitivity detector
使用高灵敏度探测器观察高分辨率元素映射图像
- 批准号:
04452103 - 财政年份:1992
- 资助金额:
$ 12.35万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
On line digital manipulation process of elastically and inelastically scattered electron signals in scanning transmission electron microscopy
扫描透射电子显微镜中弹性和非弹性散射电子信号的在线数字处理过程
- 批准号:
63850078 - 财政年份:1988
- 资助金额:
$ 12.35万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research
Developemtn of High Resolution Scanning Transmission Electron Microscope through Spherical Aberration Correction by Means of a Foil Lens
箔透镜球差校正高分辨率扫描透射电子显微镜的研制
- 批准号:
61850069 - 财政年份:1986
- 资助金额:
$ 12.35万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research
相似海外基金
Acquisition of a Field Emission Electron Gun for a Scanning Auger Microscope
获取用于扫描俄歇显微镜的场发射电子枪
- 批准号:
0216779 - 财政年份:2002
- 资助金额:
$ 12.35万 - 项目类别:
Standard Grant
Equipping a transmission electron microscope with a field emission electron gun.
配备带有场发射电子枪的透射电子显微镜。
- 批准号:
13555006 - 财政年份:2001
- 资助金额:
$ 12.35万 - 项目类别:
Grant-in-Aid for Scientific Research (B)