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Study on artificial anisotropic optical films composed of slanted numerous fine dielectric columns

由倾斜的多个细介电柱组成的人造各向异性光学薄膜的研究

基本信息

批准号：
07455153
负责人：
SHIRAISHI Kazuo
金额：
$ 4.67万
依托单位：
Utsunomiya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

For applications to optical devices, such as polarization-independent optical is olators and free-space optical interconnections, spatial walk-off polarizers are important components for splitting an optical beam into two orthogonally-polarized parallel beams. Both large beam-split angles and wide apertures are preferable for practical applications.A new fabrication method of spatial walk-off polarizers that utilizes form-birefringence in an obliquely deposited thick silicon film has been proposed and experimentally verified. The film is composed of two substances, slant needle-like silicon microcolumns and resultant fine voids around them. The structure has the uniaxial birefringence whose optic axis is parallel to the column/void axis. We tried to fabricate the film by use of an electron-beam excited evaporation method. An oblique deposition technique was used to fabricate slanted numerous fine columns/voids. To assist formation of columnar microstructures, argon gas was introduced during the evaporation process ; pressure of the gas in the chamber was 0.2mTorr. We find that clear columnar microstructures can be appeared after chemical etching of the film.The spatial walk-off characteristic has clearly been observed, and the maximum polarization-split angle in the film is measured to be 10ﾟ,being two times larger than that of existing polarizers such as those made of rutile and calcite. We have successfully performaed the research.

对于诸如偏振无关光学偏振器和自由空间光学互连的光学器件的应用，空间走离偏振器是用于将光束分成两个正交偏振的平行光束的重要部件。提出了一种利用倾斜沉积厚硅薄膜的形状双折射特性制作空间走离偏振器的新方法，并进行了实验验证。该薄膜由两种物质组成，即倾斜的针状硅微柱和围绕它们的细空隙。该结构具有光轴平行于柱/空轴的单轴双折射。我们尝试用电子束激发蒸发法制备薄膜。使用倾斜沉积技术来制造倾斜的许多细柱/空隙。为了帮助形成柱状微结构，在蒸发过程中引入氩气;腔室中的气体压力为0.2毫托。结果表明，该薄膜经化学腐蚀后可得到清晰的柱状微结构，具有明显的空间走离特性，最大偏振分束角为10 °，比现有的金红石和方解石偏光片的偏振分束角大一倍。我们已经成功地完成了这项研究。