Study of Micro-Processing of Ceramics by Excimer Laser

本研究旨在建立准分子激光对陶瓷材料进行微细加工的技术，主要研究成果如下：1。建立了一套准分子激光微加工实验系统。获得了激光的辐射机理、激光束的聚焦空间轮廓、衍射云纹传感的样品精密对准以及激光加工的最佳条件等数据和技术.钇系超导体采用射频磁控溅射法制备薄膜，采用固相反应法制备块材。采用机械过滤、机械挤压和烧结技术，将陶瓷粉末混合制成厚块试样，开发了一种新的制备方法，制备了陶瓷金属功能梯度材料.在建立了高速条纹相机和视频数字系统后，对激光烧蚀等离子体羽流的轮廓和时间特性进行了可视化。分析了烧蚀羽流的产生机理，并将烧蚀羽流与激光辐射的光子能量和陶瓷材料的带隙能量联系起来。激光烧蚀陶瓷羽流是通过光化学反应产生的.确定了激光波长、能量密度、脉冲宽度和重复频率等激光参数的最佳条件，并对一些样品进行了切割、钻孔和表面处理。通过准分子激光烧蚀实现了高分辨率.分析了加工材料的特性。开发了测量技术和系统。研究成果发表在一些期刊和会议上。

The purpose of this study was to establish the technology of micro-processing using excimer laser for ceramics.Research results of this study are summarized as follows :1. An experimental system of excimer laser microprocessing was constructed. Data and/or techniques for radiation mechanism of the laser, focusing space profile of the laser beam, precision alignment of sample using diffraction moire sensing, and optimum condition of laser processing were obtained.2. Yttrium system superconductors were produced by an rf magnetron sputtering system for thin films and by a solid phase reaction method for bulks. Ceramicmetals functionally graded materials were produced by developing a new production method using mechanical filtration, mechanical expression and sintering technology from mixing composit powders for thick blocks of samples.3. After a high speed streak camera and a video digital system were constructed, the profile and time dependence of laser ablation plasma plumes were visualized. The producing mechanism of the ablation plumes were analyzed as related problems with a photon energy of laser radiation and bandgap energy of ceramics. Laser ablation plumes from ceramics were produced by a photochemical reaction.4. Optimum conditions of laser parameters such as laser wavelength, energy density, pulse width and repetition frequency were measured and some sample materials were cut, drilled and surface treated. High resolution was performed by excimer laser ablation.5. Characteristics of processed materials were analyzed. Technologies and systems for measuring were developed.6. Research results were published in some journals and conferences.