Study of Micro-Processing of Ceramics by Excimer Laser

本研究的目的是建立准分子激光微加工陶瓷的技术。本研究的研究成果总结如下：1。建立了准分子激光微加工实验系统。获得了激光辐射机理、激光束聚焦空间剖面、衍射云纹传感对样精确对准、激光加工最佳条件等方面的数据和技术。采用射频磁控溅射法制备薄膜钇系超导体，采用固相反应法制备体系超导体。采用机械过滤、机械表达和烧结技术，将复合粉体混合成厚块状制备陶瓷功能梯度材料。构建高速条纹相机和视频数字系统后，实现了激光烧蚀等离子体羽流的轮廓和时间依赖性可视化。分析了烧蚀羽流的产生机理与激光辐射光子能量和陶瓷带隙能量的关系。利用光化学反应从陶瓷中产生激光烧蚀羽流。测量了激光波长、能量密度、脉冲宽度和重复频率等激光参数的最佳条件，并对样品材料进行了切割、钻孔和表面处理。准分子激光烧蚀可获得高分辨率。分析了加工材料的特性。测量技术和系统得到了发展。研究成果在一些期刊和会议上发表。

The purpose of this study was to establish the technology of micro-processing using excimer laser for ceramics.Research results of this study are summarized as follows :1. An experimental system of excimer laser microprocessing was constructed. Data and/or techniques for radiation mechanism of the laser, focusing space profile of the laser beam, precision alignment of sample using diffraction moire sensing, and optimum condition of laser processing were obtained.2. Yttrium system superconductors were produced by an rf magnetron sputtering system for thin films and by a solid phase reaction method for bulks. Ceramicmetals functionally graded materials were produced by developing a new production method using mechanical filtration, mechanical expression and sintering technology from mixing composit powders for thick blocks of samples.3. After a high speed streak camera and a video digital system were constructed, the profile and time dependence of laser ablation plasma plumes were visualized. The producing mechanism of the ablation plumes were analyzed as related problems with a photon energy of laser radiation and bandgap energy of ceramics. Laser ablation plumes from ceramics were produced by a photochemical reaction.4. Optimum conditions of laser parameters such as laser wavelength, energy density, pulse width and repetition frequency were measured and some sample materials were cut, drilled and surface treated. High resolution was performed by excimer laser ablation.5. Characteristics of processed materials were analyzed. Technologies and systems for measuring were developed.6. Research results were published in some journals and conferences.