Study of Micro-Processing of Ceramics by Excimer Laser

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The purpose of this study was to establish the technology of micro-processing using excimer laser for ceramics.Research results of this study are summarized as follows :1. An experimental system of excimer laser microprocessing was constructed. Data and/or techniques for radiation mechanism of the laser, focusing space profile of the laser beam, precision alignment of sample using diffraction moire sensing, and optimum condition of laser processing were obtained.2. Yttrium system superconductors were produced by an rf magnetron sputtering system for thin films and by a solid phase reaction method for bulks. Ceramicmetals functionally graded materials were produced by developing a new production method using mechanical filtration, mechanical expression and sintering technology from mixing composit powders for thick blocks of samples.3. After a high speed streak camera and a video digital system were constructed, the profile and time dependence of laser ablation plasma plumes were visualized. The producing mechanism of the ablation plumes were analyzed as related problems with a photon energy of laser radiation and bandgap energy of ceramics. Laser ablation plumes from ceramics were produced by a photochemical reaction.4. Optimum conditions of laser parameters such as laser wavelength, energy density, pulse width and repetition frequency were measured and some sample materials were cut, drilled and surface treated. High resolution was performed by excimer laser ablation.5. Characteristics of processed materials were analyzed. Technologies and systems for measuring were developed.6. Research results were published in some journals and conferences.