Multiscale multidimensional integrated imaging for precision laser processing (M2I2)

精密激光加工在先进制造领域具有巨大潜力。特征可以在多种材料中加工成几分之一微米的尺寸。使用超短激光脉冲（持续时间小于1皮秒）非常重要，因为所有激光脉冲能量都在比热扩散更短的时间尺度内传递到焦点。因此，所有的材料加工都是在任何能量可以作为热量逸出之前完成的，这支撑了该技术的高分辨率。超短激光脉冲提供了其他独特的机会，因为它们可以用于透明材料内部的三维制造，具有一系列智能技术应用。这种精密激光加工已经在工业规模上得到应用，例如智能手机玻璃的精确切割或多维数据存储。随着不断推动电子化和增强功能，该行业注定将在未来十年内开花。在亚微米尺度上制造特征的能力为先进技术提供了许多机会。然而，在厘米级工件内的三维中精确定位这种小特征产生了严重的挑战。机器视觉使用集成在制造系统内部的成像解决方案为激光工艺提供反馈，以确保设备按照设计进行加工。然而，现有的硬件和软件系统无法满足这种高精度激光加工的挑战性要求。在本项目中，我们开发了新的硬件和软件解决方案，可以实现高分辨率的快速三维成像。我们还介绍了新的系统，可以提供整个设备的宏观视图正在处理。此外，我们还建立了创新形式的光学反馈，可用于密切监控激光制造过程。所有这些信息都在一个内聚的软件框架内合并在一起，可以将重要信息快速传输到激光制造系统。这使得在要求苛刻的应用中更快、更精确地对较小的特征进行激光加工，从而实现先进技术的工业规模制造。

Precision laser processing has much potential for advanced manufacturing. Features can be machined at a fraction of a micrometre in size in a wide range of materials. The use of ultrashort laser pulses (with duration less than a picosecond) is important since all of the laser pulse energy is delivered to the focus in a timescale shorter than that for thermal diffusion. Therefore, all the material machining is done before any energy can escape as heat, which underpins the high resolution of the technique. Ultrashort laser pulses provide other unique opportunities, since they can be used for three-dimensional fabrication inside transparent materials, with a range of applications for smart technology. Such precision laser processing is already applied on an industrial scale, with examples such as accurate cutting of glass for smartphones or multi-dimensional data storage. With a constant drive for miniaturisation and enhanced functionality, the sector is destined to blossom over the next decade.The ability to fabricate features at the sub-micrometre scale presents many opportunities for advanced technology. However, accurate positioning of such small features in three dimensions inside centimetre scale workpieces creates a serious challenge. Machine vision uses imaging solutions integrated inside the manufacturing system to provide feedback for the laser process to ensure that the device is machined as designed. However, existing hardware and software systems cannot meet the challenging demands of such high precision laser processing.In this project, we develop new hardware and software solutions that will enable rapid three-dimensional imaging at high resolution. We also introduce new systems that can provide a macroscopic view of the entire device being processed. Additionally we establish innovative forms of optical feedback that can be applied to closely monitor the laser manufacturing process. All of this information is merged together inside a cohesive software framework, that can provide quick data transfer of important information to the laser manufacturing system. This enables quicker, more accurate laser processing of smaller features in demanding applications, to enable industrial scale manufacturing of advanced technology.