DEVELOPMENT OF AN ION MICROPROBE USING HIGH ENERGY ION BEAM

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We have developed a newly proton microprobe sample chamber designed for analysis of heterogeneous mineral samples. The sample chamber is equipped with a novel beam and sample optics, a computer-driven stage and external microscope and filter exchange system. Under the employed optical geometry, axs of beam and sample optics are collinear and normal to the sample surface, an essential aspect allowing high spatial resolution of analyzes and accurate, micrometer-scale sample and beam positioning. Use of a long working distance in conjunction with integral reflectance mirror are the primary design constraints satisfied for successful development. Based on measurements, the presented proton microprobe is expected to enhance studies requiring effective and easy to perform nondestructive microanalytical analysis of minerals.