DEVELOPMENT OF AN ION MICROPROBE USING HIGH ENERGY ION BEAM

我们研制了一种用于非均质矿物样品分析的质子微探针样品室。样品室配备了一个新的光束和样品光学系统，一个计算机驱动的阶段和外部显微镜和过滤器交换系统。在所采用的光学几何结构下，光束和样品光学器件的轴与样品表面共线且垂直，这是允许分析的高空间分辨率和精确的微米级样品和光束定位的重要方面。长工作距离与整体反射镜的结合使用是成功开发所满足的主要设计约束。基于测量，提出的质子微探针，预计将加强研究，需要有效的和容易的进行无损微分析的矿物。

We have developed a newly proton microprobe sample chamber designed for analysis of heterogeneous mineral samples. The sample chamber is equipped with a novel beam and sample optics, a computer-driven stage and external microscope and filter exchange system. Under the employed optical geometry, axs of beam and sample optics are collinear and normal to the sample surface, an essential aspect allowing high spatial resolution of analyzes and accurate, micrometer-scale sample and beam positioning. Use of a long working distance in conjunction with integral reflectance mirror are the primary design constraints satisfied for successful development. Based on measurements, the presented proton microprobe is expected to enhance studies requiring effective and easy to perform nondestructive microanalytical analysis of minerals.