Development of New Measuring Method of thin film thickness using Sound Frequency

开发利用声频测量薄膜厚度的新方法

• 批准号: 07555039
• 负责人: ICHIMIYA Ryoichi
• 金额: $ 3.46万
• 依托单位: Niigata university
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555039/
• 关键词: Resonance; Frequency; Measurement; Thickness; Thin film; Non-contact

When the sound wave is radiated upon a thin film mounted on a rigid box containing a air-layr, the thin film and air-layr resonate under a certain frequency. The resonant frequency depends upon the thickness of the film. The resonant frequency varies almost linearly with the thickness of the film. The experiments were conducted under various conditions in order to find important factors affecting on the frequency. The experiments for the plate to measure its thickness were also conducted. Following conclusions were introduced.** The position of the sound source upon the film does not give an affect on the resonant frequency.** From the experiments not only for the polyethylene, vinyl chloride, acryle and nylon, it was clear that the thickness of the thin film can be measured from the resonant frequency.** Similar resonant frequencies were obtained in both experiments, one is to use wide range white noise and another one is to sweep the pure tone.** This measuring method is not applicable for the hard materials such as a hard plate because the hard plate does not resonate by the sound wave from a speaker.

当声波辐射到安装在含有空气层的刚性盒上的薄膜上时，薄膜和空气层在一定频率下共振。谐振频率取决于膜的厚度。谐振频率随薄膜厚度几乎呈线性变化。在各种条件下进行实验，以找到影响频率的重要因素。并进行了平板测厚实验。提出了下列结论。声源在薄膜上的位置不会影响共振频率。**从实验中可以清楚地看到，不仅是聚乙烯、氯乙烯、丙烯酸和尼龙，薄膜的厚度也可以从谐振频率测量出来。在两个实验中获得了相似的谐振频率，一个是使用宽范围白色噪声，另一个是扫描纯音。这种测量方法不适用于硬质材料，如硬质板，因为硬质板不会因来自扬声器的声波而共振。

项目成果

Ryoichi Ichimiya Shuichi Sakamoto etc.: "Measurement of Cylinder Configuration using Sound Phase Delay" Transaction of JSME. Vol.62, no.603. 4250-4256

Ryoichi Ichimiya Shuichi Sakamoto 等：“使用声音相位延迟测量气缸配置”JSME 交易。

一宮亮一・坂本秀一 等: "音響を利用した液面レベルと傾斜角度の測定" 日本機械学会論文集(C編). 62巻595号(掲載決定). 949-955 (1996)

Ryoichi Ichinomiya、Shuichi Sakamoto 等人：“使用声学测量液位和倾斜角”，日本机械工程师学会会刊（编辑 C），第 62 卷，第 595 期（决定出版）。 (1996)

一宮亮一・坂本秀一等: "音響信号の位相遅れを利用したひずみ円形状の測定" 日本機械学会論文集(C編). 62巻603号. 4250-4256 (1996)

Ryoichi Ichinomiya、Shuichi Sakamoto 等人：“使用声信号相位延迟测量应变圆形状”日本机械工程师学会会刊（编辑 C）第 62 卷，第 603 期。4250-4256（1996 年）。 ）

一宮亮一・坂本秀一 等: "New Method of Measuring Film Thickness by means of Sound Signal" Proc.of Int.Sympo.Industrial Robots.26. 545-549 (1995)

Ryoichi Ichinomiya、Shuichi Sakamoto 等人：“通过声音信号测量薄膜厚度的新方法”Proc.of Int.Sympo.Induscial Robots.26 (1995)。

Ryoichi Ichimiya Shuichi Sakamoto etc.: "Measurement of Water Level and Slant Angle using Sound Signal" Transaction of JSME. Vol.62, no, 506. 949-955

Ryoichi Ichimiya Shuichi Sakamoto等：“利用声音信号测量水位和倾斜角”JSME汇刊。