A New Measurement Method of Thickness of a Thin Film
A New Measurement Method of Thickness of a Thin Film
批准号:
03650098
负责人:
ICHIMIYA Ryoichi
金额:
$1.34万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for General Scientific Research (C)
财政年份:
1991
资助国家:
日本
项目状态:
已结题
起止时间:
1991 至 1992
中文摘要
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英文摘要
Sound generated from a speaker through a signal generator travels to a thin film which in spread on a rigid container with an air-layer. Resonant sound generates in an air-layer of the container. Resonant frequency of sound depends on the thickness of the thin film and air-layer. Resonant sound in introduced to the FFT though the microphone, and resonant frequency is analyzed. A new measuring method of the thickness of a thin film by using the sound frequency is presented. Experimental equipment was set up to measure the thickness of the thin film. Experiments were conducted for polyethylene and vinyl chloride films. Following conclusion were obtained.(1) Good correspondence between the resonant frequency and thickness of the film was obtained. It was made clear that thickness of the film can be measured from the resonant frequency.(2) The measurement frequency increases with the decrease of the distance between the speaker and film, thickness of air-layer and thickness of the film.(3) The variation of the resonant frequency caused by the variation of thin film is big in case that the height of the speaker and thickness of the air-layer are small.(4) Relationship between the thickness of the film and the resonant. frequency describes a curved line with the decrease of the height of the speaker and thickness of the air-layer.
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Masanao YAMADA: "Measurement of Cylinder Diameter by means of Sound Signal (Increase of Sound Phase Delay by Echo)" Trans of JSME Series C (Japanese). Vol.58 No.553. 2680-2685 (1992)
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一宮 亮一: "音響信号を利用した管の長さ測定(管内空気柱の共振周波数検出)" 日本機械学会論文集C編 539号. 57. 2217-2222 (1991)
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一宮亮一: "機械系の音響工学" コロナ社, 188 (1992)
Ryoichi Ichinomiya:“机械系统声学工程” Coronasha,188 (1992)
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Ryoichi ICHIMIYA: "Study of Volume Measurement using Sound Signal (Measurement of Volumu using a Speaker as Sound Source and Sound Frequency)" Trans of JSME Series C (Japanese). Vol.57 No.541. 2888-2893 (1991)
Ryoichi ICHIMIYA:“使用声音信号进行音量测量的研究(使用扬声器作为声源和声音频率测量音量)”JSME C 系列的翻译(日语)。
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批准号:--
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项目类别:--
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资助金额:40万元
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批准年份:2020
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负责人:Vikrant Gupta
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依托单位: