A New Measurement Method of Thickness of a Thin Film

薄膜厚度测量新方法

• 批准号: 03650098
• 负责人: ICHIMIYA Ryoichi
• 金额: $ 1.34万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650098/
• 关键词: Film; Measurement; Thickness; Frequency; Sound; Resonance; 音響信号; 共鳴周波数; 厚さ測定; 非接触測定

Sound generated from a speaker through a signal generator travels to a thin film which in spread on a rigid container with an air-layer. Resonant sound generates in an air-layer of the container. Resonant frequency of sound depends on the thickness of the thin film and air-layer. Resonant sound in introduced to the FFT though the microphone, and resonant frequency is analyzed. A new measuring method of the thickness of a thin film by using the sound frequency is presented. Experimental equipment was set up to measure the thickness of the thin film. Experiments were conducted for polyethylene and vinyl chloride films. Following conclusion were obtained.(1) Good correspondence between the resonant frequency and thickness of the film was obtained. It was made clear that thickness of the film can be measured from the resonant frequency.(2) The measurement frequency increases with the decrease of the distance between the speaker and film, thickness of air-layer and thickness of the film.(3) The variation of the resonant frequency caused by the variation of thin film is big in case that the height of the speaker and thickness of the air-layer are small.(4) Relationship between the thickness of the film and the resonant. frequency describes a curved line with the decrease of the height of the speaker and thickness of the air-layer.

扬声器发出的声音通过信号发生器传播到一个薄膜上，该薄膜在具有空气层的刚性容器上传播。在容器的空气层中产生共振声音。声波的共振频率取决于薄膜和空气层的厚度。通过传声器将共振声引入FFT中，分析了共振声的频率.提出了一种利用声频测量薄膜厚度的新方法。建立了测量薄膜厚度的实验装置。对聚乙烯和氯乙烯薄膜进行了实验。得出以下结论。(1)得到了谐振频率与薄膜厚度之间的良好对应关系。很明显，膜的厚度可以从谐振频率测量。(2)测量频率随扬声器与薄膜之间的距离、空气层厚度和薄膜厚度的减小而增大。(3)当扬声器的高度和空气层的厚度较小时，薄膜的变化引起的谐振频率的变化较大。(4)薄膜厚度与谐振频率的关系。频率随扬声器高度和空气层厚度的减小而呈曲线变化。

项目成果

山田 正直: "音響信号を利用した円筒軸計の計測(平面波の位相遅れによる計測)" 日本機械学会論文集C編 554号. 58. 3024-3028 (1992)

山田诚：“使用声学信号测量圆柱轴计（通过平面波的相位延迟进行测量）”日本机械工程学会会刊，卷 C，第 554. 58. 3024-3028（1992 年）

Masanao YAMADA: "Measurement of Cylinder Diameter by means of Sound Signal (Increase of Sound Phase Delay by Echo)" Trans of JSME Series C (Japanese). Vol.58 No.553. 2680-2685 (1992)

Masanao YAMADA：“通过声音信号测量圆柱直径（通过回声增加声音相位延迟）”JSME C 系列译文（日语）。

一宮 亮一: "音響信号を利用した管の長さ測定(管内空気柱の共振周波数検出)" 日本機械学会論文集C編 539号. 57. 2217-2222 (1991)

Ryoichi Ichinomiya：“使用声学信号进行管道长度测量（管道内空气柱的共振频率检测）”日本机械工程学会会刊，卷 C，第 539. 57. 2217-2222（1991 年）

一宮亮一: "機械系の音響工学" コロナ社, 188 (1992)

Ryoichi Ichinomiya：“机械系统声学工程” Coronasha，188 (1992)

Ryoichi ICHIMIYA: "Study of Volume Measurement using Sound Signal (Measurement of Volumu using a Speaker as Sound Source and Sound Frequency)" Trans of JSME Series C (Japanese). Vol.57 No.541. 2888-2893 (1991)

Ryoichi ICHIMIYA：“使用声音信号进行音量测量的研究（使用扬声器作为声源和声音频率测量音量）”JSME C 系列的翻译（日语）。