New growth technology of oxide films "Eclipse PLD method"

氧化膜新生长技术“Eclipse PLD法”

• 批准号: 07555101
• 负责人: KOBAYASHI Takeshi
• 金额: $ 7.49万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555101/
• 关键词: PLD; laser ablation; oxide film; ferroelectric; electrooptic; 光エレクトロニクス; 結晶成長; エキシマ・レーザー; 光回路; エピタキシャル成長; ヘテロ構造

In this project work, an Eclipse Laser Ablation Method which was proposed by us has been studied and improved earnestly. This method is characterized by the dominant particle diffusion during transport. As a result, a problem of "droplet" is completely overcome. This new method is now widely used by several domestic and foreign organizations.Magnetic film, ferroelectric film, electro-optic film, superconducting film were well prepared using this method, and we have further developed more-advanced PLD technique named Eclipse-Angel. After this research period, we will concentrate our study on this advanced technology

在本课题工作中，对我们提出的一种激光蚀除方法进行了认真的研究和改进。这种方法的特点是在运输过程中占主导地位的颗粒扩散。结果，完全克服了“液滴”问题。这种新的方法目前已被国内外多家机构广泛采用，磁性薄膜、铁电薄膜、电光薄膜、超导薄膜的制备都采用了这种方法，并进一步发展了更为先进的PLD技术-在这段研究期之后，我们将集中研究这项先进技术

项目成果

T.Kobayashi: "Improved Laser Atlation Method(Eclipse Mettod)for Use to High Quality Thin Film Growth" European MRS(ドイツ・ストラ-スブルグ). (1996)

T.Kobayashi：“用于高质量薄膜生长的改进激光蚀刻方法（Eclipse Mettod）”欧洲 MRS（德国斯特拉斯堡）（1996 年）。

Minoru Tachiki: "Heteroepitaxial Growth of SrBiTio/BiSrCuO Structure by ArF Excimer Laser Ablation" Jpn.J.Appl.Phys.34. L1145-L1147 (1995)

Minoru Tachiki：“通过 ArF 准分子激光烧蚀实现 SrBiTio/BiSrCuO 结构的异质外延生长”Jpn.J.Appl.Phys.34。

Shingo Tomohisa: "Morphological Study of Epitaxial YBCO Films Grown by Eclipse Deposition" Int.Super.Elec.Conf. 453-455 (1995)

Shingo Tomohisa：“通过日食沉积生长的外延 YBCO 薄膜的形态研究”Int.Super.Elec.Conf。

M.Tachiki: "Optical Characterigation of PLD Grown SrBiTiO Thin Films" Jpn.J.Appl.Phys.35(6A). L719-L721 (1996)

M.Tachiki：“PLD 生长的 SrBiTiO 薄膜的光学特性”Jpn.J.Appl.Phys.35(6A)。

立木 実: "新しいレーザーアブレーション法(エクリプスPLD法)" O plus E. 189. 61-66 (1995)

Minoru Tachiki：“新激光烧蚀方法（Eclipse PLD 方法）”O plus E. 189. 61-66 (1995)