Development of cold plasma torch for dry process, under atmospheric pressure

本研究开发了各种常压下产生冷等离子体的装置，并对可在空气中强制等离子体的新工艺的应用进行了研究。旨在通过对控制参数的考察，阐明低温大气层开放式等离子体的本质。本研究从直径为2×50 mm和50 mm的座椅的桌子等1 mm及以下的光束出发，制作了能够在500℃的温度下将100℃及以下的放电气体放电到大气中的等离子体发生器，并阐明了其特性。作为这种新型低温大气开放等离子体的应用，阐明了陶瓷薄膜堆积和刻蚀的可能性。首先，在真空室中加工并不容易，并开发了一种有效的工艺，如橡胶和聚合物薄膜等村落等离子体表面处理。

Various devices which generated the cold plasma under the atmospheric pressure were developed in this research, and the application of the new process of plasma enforceable in air was examined. It aimed to clarify the essence of the low temperature atmosphere open plasma through the examination of the control parameter. of the plasma diagnosis and the electrical discharge shape.Various shape which arrived from the beam of 1 mm or less like the desk of the seat of 2×50mm and 50mm in the diameter was possessed by this research, the plasma generator which was able to discharge the electrical discharge gas over 100℃ or less from the temperature 500℃ into atmospheric was made, and the characteristic was clarified.The possibility of the ceramics thin film piling up and the etching was clarified as an application of this new low temperature atmosphere open plasma. to the firstMoreover, it was not easy to process in the vacuum chamber, and developed an effective process the village plasma surface treatment such as rubbers and the polymer films.