Development and application of atmospheric pressure cold plasma polymerization for surface treatment of polymer

常压冷等离子体聚合聚合物表面处理的开发及应用

• 批准号: 10555324
• 负责人: KOINUMA Hideomi
• 金额: $ 2.82万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555324/
• 关键词: Atmospheric pressure cold plasma; Combinatorial system; Pulse; Plasma polymerization; Carbon Dioxide fixation; プラズマCO_2固定

We have developed severed types of plasma generators to enable plasma processing at low gas temperatures under atmospheric pressure. The shower type plasma generator was found to give gas temperatures much lower than the others, together with a wide processing area. It is composed of an rf (13.56MHz) aluminum cathode disk with small holes through which plasma gas flows into the space between the cathode and a grounded anode plate. By the application of rf voltage to the cathode, homogeneous plasma was generated in an atmospheric pressure He gas flow through the space (1-2.5mm high) between the both electrodes. Ar plasma could also be generated when He gas flow was gradually exchanged to Ar. We introduced a function of pulse which turns on and off an rf power in short time to make gas temperature of plasma and to advance and control a reaction. The gas temperature of this shower type plasma turned out to be less than 100℃, indicating a very soft nature of this plasma.We developed a combinatorial system to treat a surface of polymer film under various plasma conditions efficiently. The polymer film is fed to the plasma area defined by a slit mask in a stepwise mode under the conditions controlled synchronously with the film movement.Plasma polymerization and copolymerization with COィイD22ィエD2 were investigated using such monomers as methane, butadiene, benzene, xylene, and styrene. Thin films were deposited from all of those monomers. Thin films which deposited by mixing COィイD22ィエD2 gas showed an absorption of carbonyl group in FT-IR spectra and it was confirmed that COィイD22ィエD2 in corporation as ester or carboxylic acid increased remarkably by switching the plasma generation from CW to pulse mode.

我们开发了多种类型的等离子体发生器，以实现在大气压力下的低气体温度下的等离子体处理。发现喷淋式等离子体发生器提供的气体温度比其他发生器低得多，同时具有较宽的加工区域。它是由一个射频（13.56MHz）铝阴极盘与小孔等离子体气体流入之间的空间阴极和接地阳极板。通过在阴极上施加射频电压，在大气压He气流中通过两个电极之间的空间（1-2.5mm高）产生均匀的等离子体。当He气流逐渐交换为Ar气流时，也可以产生Ar等离子体。介绍了一种脉冲功能，它能在短时间内接通和关断射频电源，使等离子体气体温度升高，从而达到推进和控制反应的目的。这种簇射型等离子体的气体温度低于100℃，表明这种等离子体具有非常柔软的性质。我们开发了一种组合系统，可以在各种等离子体条件下有效地处理聚合物薄膜表面。聚合物膜在与膜运动同步控制的条件下以分步模式被供给到由狭缝掩模限定的等离子体区域中.以甲烷、丁二烯、苯、二甲苯和苯乙烯等单体为原料，研究了等离子体聚合和与CO_（12）D_2 ~（12）D_2 ~（12）D_2共聚合.从所有这些单体沉积薄膜。通过混合CO_（22）O_

项目成果

鯉沼秀臣: "高気圧プラズマの発生と応用" プラズマ153委員会第41回研究会資料. 1. 1-6 (1998)

Hideomi Koinuma：等离子体 153 委员会第 41 次研究会议的“高压等离子体的生成和应用”材料 1. 1-6 (1998)。

H. Koinuma: "Combinatorial Solid State Material Science and Technology"Sci. Tech. Adv. Mat.. (in press).

H. Koinuma：“组合固态材料科学与技术”Sci。

K. Nakamura: "Plasma polymerization of cobalt tertraphenylporphyrin and the functionalities of the thin films produced"Thin Solid films. 345[1]. 99-103 (1999)

K. Nakamura：“四苯基卟啉钴的等离子体聚合以及所产生薄膜的功能”固体薄膜。

H.Koinuma: "New application of soft rf plasma generated under atmospheric pressure"Proc.China-Japan Symp.Adv.Mat.Eng.. 46 (1999)

H.Koinuma：“大气压下产生的软射频等离子体的新应用”Proc.China-Japan Symp.Adv.Mat.Eng.. 46 (1999)

H. Koinuma et al: "New application of soft rf plasma generated under atmospheric pressure"Proc. Japan-China Bilaterial Symp. Adv. Mat.. 99-103 (1999)

H. Koinuma 等人：“大气压下产生的软射频等离子体的新应用”Proc。